Rapid Defect Indentification with Layout-Aware Diagnosis



Scan logic diagnosis is a powerful tool to help failure analysis engineers determine the root cause of a failing die. Yield engineers, on the other hand, are interested in statistical analysis of volumes of high-quality diagnosis results to determine yield limiters. To be of value for both engineers, a diagnosis tool needs to be

  • Accurate,
  • With high resolution and
  • Meaningful defect classifications.

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