March 18, 2011 -- Crossing Automation Inc., automation product and engineering services provider, introduced a new line of adaptive standard mechanical interface (SMIF) loadport (LPT) products for open cassette 200mm wafer process, metrology, and inspection tools.
The adaptive SMIF-LPT solutions offer cost-effective upgrades of non-SMIF tools to SMIF, thereby enabling the conversion of existing 200mm facilities for semiconductor manufacturing at technology nodes below 180nm.
The three new configurations are designed to address original equipment manufacturer (OEM) tool configurations with difficult cassette landing stages.
- The SMIF-LPT Tr is a rotational head designed for non-perpendicular cassette placement.
- The SMIF-LPT Tx offers a lateral cassette motion to address narrow cassette-to-cassette spacing.
- The SMIF-LPT Ty has an offset arm to accommodate narrow chamber openings.
These new features can also be combined or upgraded on an existing SMIF-LPT. All of the adaptive SMIF solutions deliver improved particle performance to achieve Class 1 particle performance in a Class 100 clean room environment.
Crossing Automation supplies efficient, cost-effective vacuum and atmospheric automation solutions, materials tracking and engineering services to high volume semiconductor equipment manufacturers, IC, LED and solar manufacturers and other adjacent markets. Learn more at http://www.crossinginc.com.