Lithography Articles

JSR joins lithography research at CEA-Leti

Oct 19, 2011 JSR Micro and CEA-Leti will partner to develop sub-20nm next-generation lithography materials and processes, focusing on pitch division in 193nm optical lith...

Inside ASML's numbers: EUV update, 2012 predictions, and 450mm disconnect

Oct 13, 2011 A deep dig inside ASML's 3Q11 results and execs' commentaries unearths insights into 4Q11 and 2012 projections, an updated EUV timeline, and some curious dis...

Imec, ASML extend litho work, debut EUV sensors

Oct 10, 2011 Imec and tool vendor ASML have signed a new 5-year deal to continue collaboration on lithography technologies, both immersion and EUV, as well as associated ...

Cymer wafer-level light source metrology targets advanced lithography control

Oct 6, 2011 Light source supplier Cymer Inc. (Nasdaq:CYMI) launched SmartPulse, which monitors light source parameters at the wafer, collecting data for a suite of repor...

SPIE BACUS 2011: Having your cake and eating it too

Oct 5, 2011 Jan Willis from the eBeam Initiative summarizes the group's annual event at SPIE BACUS 2011, with presentations on both improving wafer quality and mask writ...

Semiconductors Industry News

Semiconductor tool orders slide below billion-dollar mark in September

Oct 21, 2011 Awaiting "stability in the overall economic outlook," semiconductor device makers spent 40.4% less with North America-based manufacturers of semiconductor equipment year-over-year in Sept...

Materion buys EIS Optics Limited, adds Shanghai factory

Oct 20, 2011 Materion Advanced Materials Technologies acquired EIS Optics Limited, adding a 97,000sq.ft. manufacturing site in Shanghai, China for optical coatings. EIS Optics makes optical thin film filters, g...

Asian foundry selects Mattson RTP tool

Oct 19, 2011

Mattson Technology Inc. (NASDAQ: MTSN) won acceptance for its Helios XP rapid thermal processing (RTP) system for process of record from a major Asian foundry.

Writing an outsourcing spec that delivers

Oct 18, 2011 Once you've chosen an outsourcing partner, focus on the details. Mark Danna of Owens Design shares how to write a project specification that is adaptable and designed to bring a project in on time ...

MVTS expands in California, Malaysia, and Taiwan

Oct 18, 2011 MVTS Technologies opened new offices in San Jose, CA; Penang, Malaysia; and Hsinchu, Taiwan to support growing demand for test, assembly, and other IC production equipment and services among semico...

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