Tools & Equipment Articles

Nano pillar collapse enables 10nm e-beam lithography patterns

Sep 2, 2011 MIT and A*STAR have demonstrated a new technique that could produce 10nm chip features using plastic pillar deposition and predetermined pillar collapses.

Model-based mask data prep using overlapping shots for 20nm devices

Aug 16, 2011 OPC technologies use aggressive assist features with sub-80nm features on the mask to offer improved process window, and therefore yield. MB-MDP, coupled wit...

FEI intros S/TEM with Sandia Labs order

Aug 12, 2011 FEI Company (NASDAQ:FEIC) released the Titan G2 80-200 scanning/transmission electron microscope (S/TEM) with ChemiSTEM Technology and accelerating voltage r...

Electron microscope project SALVE enters Phase 2

Aug 10, 2011 Carl Zeiss Nano Technology Systems, CEOS GmbH, and the University of Ulm have completed 2 years of evaluation and are starting the second phase of the Sub An...

FEI uncrates 3D DualBeam, touts flexibility

Aug 9, 2011 FEI has released a new version of its DualBeam system, offering a highly configurable platform to provide high-resolution, three-dimensional (3D) imaging and...

Nanotech Industry News

NeoPhotonics completes Santur buy

Oct 14, 2011 NeoPhotonics Corporation (NYSE:NPTN), photonic integrated circuit (PIC) modules and subsystems maker, completed the acquisition of privately held Santur Corp...

MIT names Microsystems Technology Lab leader

Sep 29, 2011 MIT named Vladimir Bulović as director of MIT's Microsystems Technology Laboratories (MTL). Bulović has experience in a range of advanced electronics technol...

Pixelligent raises over $5M on high demand

Sep 27, 2011 Pixelligent LLC, nanocrystal additive maker, closed $5.1 million in funding. The round was 6 times over-subscribed, requiring the company board to significan...

SWeNT clears EPA approval for MWCNT fab

Sep 22, 2011 An Environmental Protection Agency (EPA) consent order now permits SWeNT to manufacture and distribute multi-wall carbon nanotubes (MWCNT) for commercial app...

Nano electronics garner 12 grants totaling $20M from NSF, SRC

Sep 19, 2011 Semiconductor Research Corporation (SRC) joined the National Science Foundation (NSF) to fund $20 million for 12 four-year grants on nanoelectronics research...

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Small Tech Talk Blog

Small Times' Small Tech Talk Blog places news about MEMS and nanotechnology in context and analyzes trends in Small Tech.

Nanoparticles act as cancer spotters

A research team led by Brown University has devised a new technique to spot cancerous tumors in the liver as small as 5 millimeters. The technique, using gold nanoparticles, is ... Read More

Announcing New Online Seminar: Understanding Nanotechnology Safety

Registration is now open for an online seminar on nanotechnology safety. This seminar is of interest to anyone concerned about the potential health hazards of exposure to nanoen... Read More

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