MEMS Manufacturing Articles

MIT etches MEMS structures with glass stamp

Oct 19, 2011 MIT researchers developed a glass-stamp-based technique that helps fabricate lab-on-chip sensors at a lower cost than e-beam lithography and in a more reprod...

Custom SOI wafers debut from IQE for MEMS, related manufacturing

Oct 11, 2011

Wafer supplier IQE released a customizable range of silicon on insulator (SOI) products that IQE reports afford improved thickness and doping control.

Imec: First poly-SiGe MEMS on Cu-backend CMOS

Oct 10, 2011 Imec says it has built an integrated poly-SiGe-based piezoresistive pressure sensor on top of 0.13μm copper backend CMOS, the first such device directly fabr...

Present on MEMS manufacturing, inspection

Oct 5, 2011 Submit an abstract now to present at a group of co-located micro/nano manufacturing conferences. MM Live USA 2012 will co-locate with MEMS Live USA and NANO ...

NIST etches MEMS out of diamonds

Sep 28, 2011 NIST developed a method to etch diamond crystals, exploiting the cubic nature of diamond crystals. These diamond-etched features could lead to better micro e...

MEMS Industry News

Multi-cantilever MEMS technology basis of Panorama Synergy, UWA partnership

Oct 14, 2011 Panorama Synergy has formed an exclusive worldwide licensing agreement with the University of Western Australia for optical technologies related to highly sensitive measurements...

mPhase develops MEMS membrane at Argonne Labs

Oct 14, 2011 mPhase Technologies was granted access to the technical facilities at the Center for Nanoscale Materials, Argonne National Labs, for work on its MEMS Smart silicon membrane, a k...

X-FAB, Senodia ramp MEMS gyroscope production

Oct 13, 2011 X-FAB Silicon Foundries Group and Senodia Technologies (Shanghai) Co., Ltd today announced they have concluded development and are ramping production of microelectromechanical s...

CTS contracted for 2 piezo-ceramic programs

Oct 12, 2011 CTS Electronic Components, of CTS Corporation (NYSE:CTS), received 2 production orders for piezoceramic products from a major US sonar manufacturer. Revenues should total about ...

Deformable-mirror MEMS improve glaucoma research

Oct 12, 2011

The University of Houston College of Optometry is using MEMS-based deformable mirrors, Multi-DM, from Boston Micromachines Corporation (BMC) in glaucoma research.

Small Tech Talk Blog

Small Times' Small Tech Talk Blog places news about MEMS and nanotechnology in context and analyzes trends in Small Tech.

Nanoparticles act as cancer spotters

A research team led by Brown University has devised a new technique to spot cancerous tumors in the liver as small as 5 millimeters. The technique, using gold nanoparticles, is the first ... Read More

Announcing New Online Seminar: Understanding Nanotechnology Safety

Registration is now open for an online seminar on nanotechnology safety. This seminar is of interest to anyone concerned about the potential health hazards of exposure to nanoengineered m... Read More

MEMS White Papers

MEMS Videos

MEMS Financials

MEMS Webcasts

Understanding Nanotechnology Safety

This special two-hour live seminar is designed to educate you on the real dangers of nanotechnology, provide insight into nanotoxicity and nanopathology, and...