|5 March 2013|
|Free to Attend|
|Approximately One Hour|
|Shaun Pewsey, Director of Microelectronics Strategic Accounts, Brooks Instrument|
This event was originally broadcast on March 5th, 2013 and is now available for on-demand viewing.
As the semiconductor industry moves toward smaller geometries, manufacturing processes are becoming more complex. In particular, they’re more demanding of all the variable parameters on a process tool, including process gas accuracy. Cutting down on variability in the process positively impacts productivity and yield.
Mass flow controllers (MFCs) are critical to maintaining process control. Now, next generation MFCs like the GF135 from Brooks Instrument are enabling a leap forward in advanced process gas chemistry control. This technology optimizes semiconductor manufacturing processes while moving quality control upstream with features like:
• Integrated rate-of-decay (ROD) flow-error detection without process disruption, identifying and correcting issues before they happen, preventing wasted time and wasted wafers
• Improved process gas accuracy
• Enhanced pressure transient insensitivity (PTI) for critical processes
• Zero stability trending and correction ensuring accuracy at critical low flow set points
• Ultra-fast flow settling time for reduced process cycle time
Learn how you can improve your process yield and uptime – and your bottom line.
|Shaun Pewsey Director of Microelectronics Strategic Accounts Brooks Instrument|
Brooks Instrument is a multi-technology instrumentation company serving a range of demanding markets. Brooks has a proven history of innovation, including the original commercial design that set the standard for today’s thermal mass flow controllers, first high-performance digital mass flow controller, first gas and range programmable thermal mass flow controller (MultiFlo™), the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series) and the first variable area meter with Foundation Fieldbus (MT3809 & MT3750).
Brooks Instrument’s portfolio includes glass and metal tube variable area meters (rotameters), thermal mass flow controllers and meters from ultra-high purity to industrial grade, Coriolis mass flow controller (Quantim), vacuum measurement and pressure control products, direct liquid injection vapor delivery systems, magnetic level instruments, and a variety of flow accessories. Brooks also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, and flow control valves.
Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. Any time you need expertise on flow and pressure solutions, products, or sales contacts, please visit www.BrooksInstrument.com.