Wet Etch
Wet Etch news and technical articles from Solid State Technology Magazine. Search Wet Etch latest and archived news and articles
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Conference Report: MRS Spring 2012, Day 3
… chemical removal or CMP after etch. More recently, work is underway on an undoped carbide variant that can be removed with wet etch and does not require CMP. N7.1 Sang-Woo Kim from Sungkyunkwan U (Korea) described a high performance, transparent …
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SPTS sends dry MEMS etch tool to China research institute
… throughput and repeatable etch processes. SPTS’ HF vapor etch technology reportedly prevents stiction, which occurs during wet etch when the released microstructure and substrate are pulled together by the surface tension of the liquid between them during …
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LED PSS etch station speeds throughput with higher temps
… light-emitting diodes' (LED) light output and efficiency while increasing manufacturing throughput. In the MicroTech wet etch system, gallium nitride (GaN) or indium gallium nitride (InGaN) coated wafers are submerged in the etch tank with …
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Intel awards 9 elite suppliers in 2011
… 200mm and 300mm polished epitaxial silicon wafers. Tokyo Electron Limited (TEL) - coater-developers, dry etch, wet etch and test systems. Brian Krzanich, SVP and COO, outlined the parameters for SCQI awards as continuous improvement in …
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CEA-Leti unveils wide-reaching silicon research scope
… volume activities, and high-value silicon wafer suppliers. 3S addresses deposition ; front side/back side clean , wet etch , and strip; lithography with dual side alignment capability; etching , implant, epitaxy , diffusion; chemical mechanical …
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Imec, Lam Research improve wafer drying with test method
… contrast to other proposed test structures such as cantilevers and DRAM cylinders, these nano-pillars do not require any wet etch treatment during patterning, making the structures suitable for investigating various cleaning techniques. Inspection …
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Ametek heat exchangers withstand corrosive solar and chip processes
… photovoltaic cells and semiconductors . AMETEK heat exchangers are immersed in acid baths to control fluid temperatures. Wet etch , cleaning, and other chemical processes that heat or cool highly corrosive high-purity acids can benefit from the …
