Wet Cleaning
Wet Cleaning news and technical articles from Solid State Technology Magazine. Search Wet Cleaning latest and archived news and articles
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FSI wins wafer clean tooling orders from FEOL and BEOL customers
… processes. Foundry and logic manufacturers are finding low-k materials and metal film stacks much more sensitive to wet cleaning than previous BEOL process generations, FSI notes. The closed chamber technology of the ORION system has demonstrated …
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Imec, Lam Research improve wafer drying with test method
… trench isolators, gate structures, and stacked capacitors can fall victim to capillary forces during the dry step of wet cleaning processes. Improved drying techniques will reduce the risk of stiction. Also read: Imec, ASML extend litho work …
