Wafer Process
Wafer Process news and technical articles from Solid State Technology Magazine. Search Wafer Process latest and archived news and articles
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Single-wafer process for improved metal contact hole cleaning
… rinse methods used in a wet bench. When a single- wafer process is used for the same post-etch residue clean, there ..... monitor the performance and stability of the single- wafer process , electrical and defect data were collected for a 12 …
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Managing across-wafer process variation
… recurring cost. There are a plethora of systematic across- wafer process variations, but only the most stable and pervasive ..... application and would provide early detection of across- wafer process variations. Once these variations are measured, they …
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Fraunhofer delivers 300mm wafer processing to North America with Axus Technology
… technology centers of Dresden, Germany, will use CMP supplier Axus Technology exclusively to provide advanced 300mm wafer process development and foundry services to North American customers. Axus Technology is partnering with the Fraunhofer centers …
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SOI wafers based on epitaxial technology
… increase capacity and reduce costs. The epitaxial SOI wafer process described here includes a hydrogen annealing process ..... Active layer quality issues Figure 1. Epitaxial SOI wafer process flow. Click here to enlarge image The quality of the …
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Elantec forms strategic wafer foundry agreement
… establishes Philips Semiconductors' Albuquerque, NM, site as the primary bipolar foundry for Elantec's future bipolar wafer process requirements. Elantec, which makes analog ICs, said it will continue to make existing bipolar product lines at its …
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DongbuAnam to process LCD driver IC wafers for Tomato LSI
… DongbuAnam Semiconductor has announced that Tomato LSI Inc. (TLSI) has selected its high-voltage, 0.18-micron CMOS wafer process to manufacture LCD driver IC (LDI) devices. DongbuAnam will begin providing wafer foundry services to the Korean …
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Small-footprint Furnace
… Process Probe 1840 instrumented silicon wafers, with up to 31 integrated resistance temperature detectors, measure wafer process temperatures from 0-230?C to <0.1?C absolute accuracy, and uniformities to <0.05?C point-to-point …
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Elantec Announces Strategic Wafer Foundry Agreement
… Philips Semiconductors' Albuquerque, New Mexico site as Elantec's primary bipolar foundry for its future bipolar wafer process requirements. Elantec will continue to manufacture existing bipolar product families at its wafer fabrication facility …
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Uninterruptable power and vacuum supply
Uninterruptible power and vacuum supply UPVS provides continuous back-up power and wafer-handling vacuum for wafer process tools and handling equipment, preventing wafer breakage. The vacuum section has a high-reliability vacuum pump …
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Uninterruptible power and vacuum supply
Uninterruptible power and vacuum supply UPVS provides continuous back-up power and wafer-handling vacuum for wafer process tools and handling equipment, preventing wafer breakage. The vacuum section has a high-reliability vacuum pump …
