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Wafer Holder

Wafer Holder news and technical articles from Solid State Technology Magazine. Search Wafer Holder latest and archived news and articles

  1. Robot for use in ultrahigh vacuum

    Magazine Articles

    Fri, 1 Aug 1997

    contains the robot. Transfer occurs as follows: a) The wafer holder turns toward chamber A by the revolving motion of the ..... connected to the end of each spring arm to support the wafer holder . Each arm has the following features: It maintains

  2. New Products

    Magazine Articles

    Sat, 1 Dec 2001

    325-6000 wafer jar loader automatically removes wafers from cassettes and safely loads them into shipping jars. The wafer holder cassette is placed in the Speedline loader with the H-bar facing up, not down, eliminating the need to rotate wafers

  3. Furnace-based rapid thermal processing

    Magazine Articles

    Sun, 1 Oct 2000

    quartz injector tube, as well as through the elevator tube. To begin processing, the wafer is placed on a quartz wafer holder that sits on a quartz elevator tube. The wafer temperature is then changed by moving the wafer in the vertical direction

  4. Innovative products for wafer processing focus on smaller features, fewer defects, and COO

    Magazine Articles

    Tue, 1 Jul 2003

    in applications such as gold and solder wafer bumping, redistribution layers, and various MEMS layers. The Stratus wafer holder ensures precise alignment between the wafer and critical process elements, such as the agitation paddle and plating electrodes

  5. Semicon/Southwest Products

    Magazine Articles

    Wed, 1 Oct 1997

    These crystals are fired in sequence, creating a forceful megasonic wave that yields very good sub-µm cleans. The wafer holder is held stationary in the cleaning tank, significantly reducing the amount of chemicals consumed, with a liquid tank

  6. Precision thickness control in the ECES process

    Magazine Articles

    Mon, 1 Nov 2004

    potential. Meanwhile, those wafer surfaces that were not to be etched were protected from the KOH solution by a special wafer holder ; those portions of the wafer surface that were supposed to be etched, were directly exposed to the KOH solution

  7. Product News

    Magazine Articles

    Sun, 1 Jun 2003

    in applications such as gold and solder wafer bumping, redistribution layers, and various MEMS layers. The Stratus wafer holder ensures precise alignment between the wafer and critical process elements, such as the agitation paddle and plating

  8. Processing for advanced devices with hot-wall furnace RTP

    Magazine Articles

    Sat, 1 Jul 2000

    reduced. Uniform wafer temperature during ramp and steady state is made possible by transporting the wafer in a quartz wafer holder with custom features that minimize edge-to-center temperature differences. If the radial delta temperature (RDT

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