Wafer Holder
Wafer Holder news and technical articles from Solid State Technology Magazine. Search Wafer Holder latest and archived news and articles
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SEMICON West 2012 exhibits preview: Wafer processing and handling
… conductivity, high electrical conductivity, and durability in chemicals. Products include wafer process components such as wafer - holder plate for SiC-Epi/MOCVD, dummy wafers, disc plates, rings and heater filaments etc. 450mm parts are now available …
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Advanced Packaging Awards Entry Showcase
… wafer load. A patented contact ring seal provides a leak-tight, uniform, self-checking seal of the wafer in the wafer holder . ShearPlate technology creates fluid agitation less than 2 mm from the surface of the wafer. NEXX Systems Inc …
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The APAs: Honoring Industry Innovation
… wafer load. A patented contact ring seal provides a leak-tight, uniform, self-checking seal of the wafer in the wafer holder . ShearPlate technology creates fluid agitation less than 2 mm from the surface of the wafer. NEXX Systems Inc …
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In Uncharted Territory
… to enlarge image null 3. John Harrell, systems engineer for the Stratus electrodeposition tool, demonstrates the wafer holder and how it is placed in the plating cell. Click here to enlarge image null 4. Kyle Martin, assembly technician, really …
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2007 Finalist Showcase
… integrity upon wafer load. A contact ring provides a leak-tight, uniform, self-checking seal of the wafer in the wafer holder . ShearPlate technology creates fluid agitation less than 2 mm from the surface of the wafer. NEXX Systems Inc …
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Using existing production tools for low-cost thin wafer handling
… widely used in the industry as a production workhorse. From the atmospheric front end, the wafer is inserted into a wafer holder , held by a 1.5mm edge exclusion clamp ring, and passed serially through four vacuum-isolated process chambers …
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Surface preparation prior to deposition
… or central thermocouple (K), suspended below the wafer holder . The central thermocouple passes through the spider in proximity to the wafer holder . The reactor further includes a plurality of secondary …
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Copper BEOL solutions for advanced memory
… conditions including rotation, entry speed and especially the timing and profile of the electrical waveform applied to the wafer holder assembly. For example, accurate control of the electrical profile is achieved by using a potentiostat connected to …
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Product News
… for water containment instead of an air curtain, which Nikon claims contributes to evaporation and deforming of the wafer holder , thus impacting the overlay. The company reports a single tool overlay specification of <6.5nm and 4.5mλ aberrations …
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Nikon, ASML ready for "last" battle with 193nm high-NA water immersion tools
… for water containment, instead of an air curtain which Nikon claims contributes to evaporation and deforming of the wafer holder , thus impacting the overlay. The tool incorporates Nikon's Polano fourth-generation polarization technology …
