Wafer Etching
Wafer Etching news and technical articles from Solid State Technology Magazine. Search Wafer Etching latest and archived news and articles
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A move to single wafer cleaning
… scrubbers) used in post-CMP cleans can be considered a single wafer cleaning process, and some fabs use single wafer etching for backside thinning and layer removal. But for critical cleans, single wafer cleaning is new. Megasonics, which …
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Predicting plasma in wafer etch and deposition via quantum mechanics
… this article. Etching silicon dioxide using fluorocarbon-based plasmas How can we understand how silicon dioxide wafer etching by fluorocarbon plasma produces surface features? How do we find out more about the plasma chemistry? Fluorocarbon plasma …
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Response surface methods for peak process performance
… known to affect their single- wafer etching process: a) gas flow rate ..... Design matrix for RSM on single- wafer etching process. The CCD template calls ..... determining where to set up the single- wafer etching process is the view of measured …
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Single-wafer processing is key to MEMS success
… such as vapor-phase etching, the time to complete the process is actually significantly longer compared to single- wafer etching . Release etching for a batch of 25 MEMS wafers, for example, can require a total cycle time measured in hours …
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Marketing novel technology: An historical lesson
… complexity of plasma chemistry. Commercial single- wafer etching was pioneered by Tegal in the 1970s, but mere single ..... first product in 1980 — the AutoEtch 480: single- wafer etching with double loadlocks, robotic arms, microprocessor …
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Fluorine plasma chemistry for high-AR dielectric etching
… c -C 4 F 8 , c -C 5 F 8 , and C 4 F 6 . However, dramatically different performances were observed for patterned wafer etching as the feature sizes shrank from open areas of a few microns to smaller feature sizes. The biggest differences were …
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New Products
… remove moisture to <50 ppb in HCl and HBr service. Removal of moisture is critical in applications such as silicon wafer etching , as it leads to loss of etch rate uniformity. Both media are available in all standard purifier assembly configurations …
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Extending process flexibility for single-wafer wet etch
… relatively inexpensive bulk or bottled sources (as opposed to more expensive pre-mixed proprietary formulations). Thin wafer etching As mentioned above, the systems are well suited to thinning and stress relief after grinding operations. The systems …
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ESPRIT's Semiconductor Equipment Assessment Initiative
… s partner is Siemens. The other is at SEZ Equipment AG for single wafer wet etching equipment (front and backside wafer etching ), partnered with I300I. "Basically, these initiatives are open to all European equipment manufacturers, so we …
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Addressing sidewall roughness using dry etching silicon and SiO 2
… through-wafer etch rate was 1.2µm/min. Through- wafer etching to a depth of 400µm without performance deficit was ..... submicron processing to high-rate, deep through- wafer etching . One can routinely achieve vertical dielectric features …
