Wafer Cleaning
Wafer Cleaning news and technical articles from Solid State Technology Magazine. Search Wafer Cleaning latest and archived news and articles
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Steam + gas subsystem targets film uniformity, better wafer cleaning , and PV fab steps
… oxide film uniformity and particle removal after condensation. The subsystem also suits new forms of semiconductor wafer cleaning , since the combination of ultra-high-purity steam and hot compressed gas provides a "sweep gas" that removes …
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EVG wafer clean tool installed at Tokyo Institute of Technology
… EVG301 semi-automated single- wafer cleaning system to Tokyo Institute of Technology ..... optical ICs. The EVG301 performs wafer cleaning for various wafer bonding processes ..... interface via the EVG301 megasonic wafer cleaning system. Tokyo Institute of Technology …
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Semiconductor wafer fab equipment trends: Wafer clean
… by process step. Here, CJ Muse looks at trends in wafer cleaning , such as single wafer and bevel clean. In 2011, spray ..... market, as chip complexities are driving single- wafer cleaning to maintain yields. As edge yields become ever more …
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Dainippon Screen single-wafer clean tool boasts 800 WPH
December 1, 2011 -- Dainippon Screen Mfg. Co., Ltd. has developed a scrubber-type SS-3200 single wafer cleaning system with up to 800 wafers per hour capacity and highly stable processing. The SS-3200 targets next-generation …
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FSI ORION single-wafer clean tool ordered for Asian foundry
… FSI International Inc. (Nasdaq:FSII), surface conditioning equipment supplier, will ship an ORION single wafer cleaning system to a leading Asian semiconductor foundry. The chip maker qualified the ORION for 28nm front-end-of-line …
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Wafer fab equipment leaders in 2011 and expectations for 2012
… with TEL picking up 7% and Hitachi picking up 6%, again likely due to the mixshift to Intel. Lam’s single- wafer cleaning tool share dropped slightly to 19% in 2011 from 21% last year, with incremental growth at TEL. Though the market …
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The effect of pumping methods on wet etching processes
… Society, 156 (1), H39-H42, 2009. 2. R. P. Venkatesh, J-S. Lim and J-G. Park, Random yield loss during wafer cleaning , Solid State Technology, 54(4), 16-18 &23, 2011. Jung-Soo Lim received his BS in chemical Engineering …
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FSI wins wafer clean tooling orders from FEOL and BEOL customers
… equipment supplier, won orders for multiple ORION single wafer cleaning systems . A memory maker will use the ORION in wet ..... applications-and-products/orion-single- wafer - cleaning -system Subscribe to Solid State Technology/Advanced …
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EVG moves Chinese SOI bonder customer to full automation
… well-established production process to the fully automated system. Currently, the company uses an EVG301 single wafer cleaning system with pre-bonding and IR inspection station. SOI wafers are used to make micro electro mechanical systems …
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Adhesive improves solar silicon ingot sawing, dissolves in H20
… during ingot slicing. The adhesive has no caustic odors, does not corrode equipment, and can be processed in current wafer cleaning solutions and processes. Henkel operates worldwide in three business areas: Laundry & Home Care, Cosmetics/Toiletries …
