Wafer Clean
Wafer Clean news and technical articles from Solid State Technology Magazine. Search Wafer Clean latest and archived news and articles
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FSI ORION single-wafer clean tool ordered for Asian foundry
… order in Q1 of fiscal 2012. This is FSI’s sixth order for the ORION single- wafer clean system with closed chamber design. Also read: FSI wins wafer clean tooling orders from FEOL and BEOL customers The process chamber design’s integrated …
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Semiconductor wafer fab equipment trends: Wafer clean
… manufacturers, the bevel clean market is poised to grow. For information on the top players in this market (Lam’s single wafer clean share, etc), read Wafer fab equipment leaders in 2011 and expectations for 2012 Next in the series: Deposition trends …
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EVG wafer clean tool installed at Tokyo Institute of Technology
EV Group (EVG) shipped an EVG301 semi-automated single-wafer cleaning system to Tokyo Institute of Technology, for research on advanced optical communication ICs.
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FSI wins wafer clean tooling orders from FEOL and BEOL customers
FSI International Inc. (Nasdaq:FSII), surface conditioning equipment supplier, won orders for multiple ORION single wafer cleaning systems. A memory maker will use the ORION in wet photoresist strip and etch and a foundry will use it for backend-of-line (BEOL) processes, like cleaning film stacks.
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Dainippon Screen single-wafer clean tool boasts 800 WPH
Dainippon Screen Mfg. Co., Ltd. has developed a scrubber-type SS-3200 single wafer cleaning system with up to 800 wafers per hour capacity and highly stable processing.
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Profits jump for Japanese wafer -clean tool supplier
April 4, 2007 - SES Co., a manufacturer of wafer-cleaning equipment, expects its annual profits to double to about 2.5 billion yen (US $21.2 million) through March 2008, on 10% higher sales of about 24 billion yen ($203.9 million), citing growing demand from chipmakers supplying components for ...
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Applied Materials to Acquire Wafer Clean Technology from SCP
SANTA CLARA, CA--(BUSINESS WIRE)--June 28, 2005--Applied Materials, Inc., the world's largest supplier of wafer fabrication solutions to the global semiconductor industry, today announced the signing of a definitive agreement with SCP Global Technology, Inc. to acquire SCP's single-wafer HF-last ...
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300mm wet processing tool in place for boom
The marketing logic behind the recent introduction of a high-throughput single- wafer clean platform by SEZ (Villach, Austria) points to rising single-wafer wet surface prep at the expense of wet benches and spray …
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Semiconductor fab tool capex trends gleaned @ SEMICON West
… slightly better foundry capex in 2013, driven by steady 28nm deployments. Some notes on equipment trends: Single- wafer clean is gaining traction as chipmakers performance demands rise (source: Lam Research); Intel’s investment in ASML …
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World News
… AZ, injured eight people. Production at nearby Fab 12 was uninterrupted, according to the company. FSI has won wafer clean tooling orders from FEOL (memory) and BEOL (foundry) customers. SEMATECH has hired ex- Kovio exec Richard Young …
