Wafer Chucks
Wafer Chucks news and technical articles from Solid State Technology Magazine. Search Wafer Chucks latest and archived news and articles
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"In-the-trenches" roundup of ISMI
… talks included how to fix litho "hot spots," cleaning wafer chucks without DI water or solvents, guidelines for detecting ..... cleaning method developed by the services group to clean wafer chucks in scanner tools -- in this case, ASML Twinscan models …
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Lithography and wafer bonding solutions for 3D integration
… modification. There is no need for special end-effectors, wafer chucks , cassettes, or pre-aligners. No downtime at all ..... modifications, whereas oversized carriers would require special wafer chucks and cassettes for the wafer stack. Even more important …
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Handling the 450mm Wafer with Structural Ceramics
… equipment size and dynamic loads we are also faced with material limitation. Fabrication of ceramic end-effectors and wafer chucks become much more expensive and difficult to produce. The use of large sheet ceramics and "structural ceramics" techniques …
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Thin wafer handling: Analysis of wafer-support tooling for stencil-print coating of thinned wafers
… steel, ceramic porous vacuum insert. * Flatness values are predicted, not measured. A number of suppliers offer wafer chucks for use in coating processes. Table 1 compares the construction, vacuum design, and surface flatness characteristics …
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Tackling systematic/random variations while matching process chambers
… topics discussed at the recent ISMI Symposium on Manufacturing Effectiveness , including litho "hot spots," cleaning wafer chucks , detecting/preventing ESD events, and the ongoing debate over 450mm wafers. This week we focus on another ISMI …
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Product News
… Cadence Design Sytems Inc., San Jose, CA; ph 408/943-1234, www.cadence.com. Ultra-flat, ceramic vacuum wafer chucks Click here to enlarge image These ultra-flat, high-purity ceramic vacuum chucks are three to five times stiffer than …
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Laser processing enables high-efficiency silicon-cell concepts
… 4 532nm lasers each with ~50W output power. Appropriate inline tooling would also include multiple scan-heads, wafer chucks , and fully-automated loading/unloading of wafers. Laser patterning of dielectric layers The scribing processes …
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Firms pushing "PMOD" thin-film deposition
… one-step patterning using direct-write ebeam or nanoimprint litho, and even repairing/enhancing electrostatic wafer chucks using a PMOD alumina, like a spin-on glass, the company explained. PMOD was developed in the early 1990s independently …
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December 2007 Exclusive Feature #1: "In-the-trenches" roundup of ISMI
… productivity methodologies, ESH, and sustainability. Specific talks included how to fix litho "hot spots," cleaning wafer chucks without DI water or solvents, guidelines for detecting/preventing electrostatic discharge (ESD) events, and why …
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Product News
… min. Hardware and proprietary design improvements have been made to the vacuum pumping lines, process chamber, wafer chucks , and pressure control system. Gas delivery optimization has been monitored in a mass production environment, showing …
