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overview In 300mm wafer fabs, the transport wafer carrier will play a vital role in manufacturing success ..... important to quantitatively test and measure wafer carrier performance. The wafer carrier architecture of choice for 300mm is the front
2011 -- Custom fabricated sapphire wafer carriers that are uniform, parallel, and impervious ..... Meller Optics Inc. Meller Sapphire Wafer Carriers feature ±1.2µm thickness and part ..... withstanding repeated use, Meller Sapphire Wafer Carriers are chip-, chemical-, and scratch
Eagle MHC Clayton, DE www.eaglegrp.com Automated wafer carrier inspection system Designed to characterize cassettes and FOUPs to enhance yield, the CV Series of automated wafer carrier inspection systems provide measurements of critical dimensions
(March 1, 2005) Chaska, Minn. — Entegris announces that they have signed a license patent agreement with one of its three Japanese competitors in the wafer - carrier market. The agreement includes royalty payments to Entegris for past and future shipments of 300-mm wafer carriers by the Japanese ...
planned and built with an unprecedented degree of automation. Wafer carriers for 300mm front opening unified pods or FOUPs are no longer ..... CA. Adapted from K. Mikkelsen, "Transport and storage wafer carrier COO," Proceedings of the Advanced Semiconductor Manufacturing
Court for the Southern District of New York, citing infringement on five US patents included in its 300mm front-opening wafer carrier technology. At the time Entegris claimed it was owed back royalties amounting "well into the millions of dollars," after
Necessity prompts wafer carrier invention Model KA250, un veiled ..... different materials into the classic wafer carrier shape. "We combined polycarbonate ..... everywhere else. The result is a wafer carrier that possesses the characteristics
H-Square Corp introduced its 450mm Ergolift for handling new 450mm semiconductor wafer FOSB/MACs, which can weigh more than 60lbs.
Entegris entered into a worldwide patent license agreement with 3S Korea, covering a suite of Entegris patents for 300mm front opening shipping box (FOSB) products used to transport silicon wafers for semiconductor manufacturing.
other is for a wafer carrier that will be ..... burned a lot of wafer carriers ," Peterkin ..... evaluating Class 1A wafer carriers , the outcome ..... fabrication of the wafer carrier met the requirements ..... For Class 1B wafer carriers , the results