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Gen2 high-volume 3D wafer processing tool for permanent wafer bonding , or debonding and cleaning of 200mm and 300mm wafers. The ..... complementary platform to SUSS MicroTec's XBS300 temporary wafer bonder . Device wafers are temporarily bonded to a carrier in the
developed a fully automated 8" wafer bonding machine that bonds large-scale ..... bonding. Previous room-temperature wafer bonding systems used ion guns, which could not acheive 8" wafer bonding . Whereas an ion gun radiates an
September 7, 2011 - PRNewswire -- Wafer bonding tool maker EV Group (EVG) launched ..... flagship model in the GEMINI FB fusion wafer bonding family. The GEMINI FB increases system ..... temperature plasma activation enables wafer bonding and stress/damage free annealing
production. Room-temperature wafer bonding eliminates heat stress and strain ..... various metals. Also read: MHI 8" wafer bonder produces 3D LSI ICs at room temp ..... launched its room-temperature wafer bonding platform in 2006. MHI is involved
insulator (SOI) and direct wafer bonding . Simgui is moving from EVG's semi-automated wafer bonder to advance high-volume SOI production ..... bonder . EV Group (EVG) makes wafer bonding , lithography/nanoimprint lithography
today announced that ZoneBOND can be performed on its XBC300 wafer bonding platform as well. The system supports all currently-available ..... visit http://www.suss.com . Also read: Temporary wafer bonding market: More than 10 approaches today and Thin wafers win
Inn, Austria Megatrends driving wafer bonding are heterogeneous and 3D integration. The first major boost for wafer bonding technology came from automotive ..... manufactured using glass frit wafer bonding . Accelerometers and gyrometers
bonding technologies will be required for handling support. Wafer bonding tapes are unsuitable for ultra-thin wafers: they cause ..... TMAT, TOK, Triquint, Veeco, Yushin The goal is temporary wafer bonding at a low cost, with high temperature resistance and no or
company Brewer Science Inc. and equipment supplier EV Group (EVG) will both commercialize ZoneBOND technology for temporary wafer bonding , thin wafer processing , and debonding applications. ZoneBOND works with silicon, glass, and other carriers and existing
December 5, 2011 - PRNewswire -- EV Group (EVG), wafer bonding and lithography equipment supplier, introduced the ..... as seen in the relaunch of the GEMINI FB fusion wafer bonder family at SEMICON Taiwan 2011. EVG will be exhibiting