Vapor Phase
Vapor Phase news and technical articles from Solid State Technology Magazine. Search Vapor Phase latest and archived news and articles
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Rehm on Vapor -phase Reflow
Mark Dalderup, Rehm, discusses his company's international goals and their vapor - phase reflow products, including a vacuum system to prevent voids.
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Flip Chip Cleaning with Vapor Phase Solvents
… time available for dissolution. Cleaning Requirements Vapor phase solvent blends possess good wetting characteristics ..... resulting in voids. The current cleaning process uses a vapor - phase fluid based on hydrofluorocarbon azeotropic cleaning …
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Epitaxy/epitaxial vapor phase systems
Epitaxy/epitaxial vapor phase systems
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Soldering systems, reflow equipment/vapor phase
Soldering systems, reflow equipment/ vapor phase
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Soitec claims lower-cost GaN template wafers for LED fab with HVPE, partners with Silian
… gallium nitride (GaN) template wafers using hydride vapor phase epitaxy (HVPE). The resulting GaN template wafers will ..... more cost effective than those made via metal organic vapor phase epitaxy (MOVPE). Silian will adopt Soitec’s HVPE …
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Oxford Instruments buys TDI, expands HB-LED biz
… Instruments says it has acquired Silver Spring, MD-based Technologies and Devices International, a developer of hydride vapor phase epitaxy (HVPE) technology and processes (described as an alternative to metal-organic chemical vapor deposition …
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Inside Oxford/TDI’s HVPE technique for InGaN growth
TDI, an Oxford Instruments company, recently announced that it has developed a hydride vapor phase epitaxy (HVPE) technology that is based on a GaCl 3 -InCl 3 -NH 3 system. The new process is able to control the growth rate …
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Inside Oxford/TDI's HVPE technique for InGaN growth
… Technology Oct. 30, 2008 - TDI, an Oxford Instruments company, recently announced that it has developed a hydride vapor phase epitaxy (HVPE) technology that is based on a GaCl 3 -InCl 3 -NH 3 system. The new process is able to control the …
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Anhydrous HF etch reduces processing steps for DRAM capacitors
… anhydrous hydrogen fluoride (AHF) vapor - phase etch process, at the heart of ..... Cylindrical Capacitors Using Anhydrous HF Vapor Phase Chemistry," Proc of the 4th Intl ..... Wafer Temperature Dependence of the Vapor - Phase HF Oxide Etch," Journal of the …
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Implementation of next-generation device technology to be discussed at The ConFab 2013
… implications due to the delayed migration to EUV, the introduction of 450mm wafers , the migration of deposition to vapor phase processes, and novel cleaning and CMP processes . Having been on both sides of the fence as a user and seller of materials …
