Vacuum Pump
Vacuum Pump news and technical articles from Solid State Technology Magazine. Search Vacuum Pump latest and archived news and articles
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Advances in oil-free vacuum pumps
… Advances in oil-free vacuum pumps Eckhard Bez, Leybold ..... the last two decades, vacuum pump manufacturers have been ..... difficult. Many of the dry vacuum pumps available are specifically ..... be separate from the vacuum pump . A seal between the …
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Vacuum pump for wafer fab quiets vibration: Pfeiffer Vacuum
… turbopumps , the HiPace M. HiPace M vacuum pumps have high pumping speeds (300 I/s ..... compression ratios for all gases. These vacuum pumps are optimized to run in all orientations ..... reduced. Aluminum housings make the vacuum pumps lightweight. An optional sealing gas …
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Oil-free vacuum pump
Oil-free vacuum pump Danielson Associates` full line of Tribodyn, oil-free vacuum pumps eliminate oil contamination problems caused by backstreaming oil vapors on active optical components and films. Sixteen models …
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LG.Philips LCD selects BOC Edwards vacuum pump systems for new plant
… yesterday it has been selected to supply a majority of the vacuum pump systems for LG.Philips LCD Plant 7, currently under construction ..... serviceability and single point of contact hook up. The diFxK vacuum pumps are built at Songwon Edwards Ltd, a BOC Edwards operating …
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Vacuum pumps improve throughput by 90% with new rotary design
… nearly 90% percent in maximum gas flow, compared to existing vacuum pump products, the company reports. The pumps’ fully integrated ..... the connection cable and rack conventionally required for vacuum pumps . This reduces the vacuum system footprint in the fab, and …
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Edwards optimizes dry vacuum pumps for FPD fab
… smaller loadlocks at Generation 4 (Gen-4) through the largest at Gen-8 and Gen-10 fabs. Also read: Edwards tailors vacuum pump for LED, compound semiconductor manufacturing The iXL250Q is targeted for smaller chambers used for earlier generation FPDs …
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Vacuum Pump Inlet Traps For Solar Cell and LED Manufacturing
JULY 22, 2009 – N. BILLERICA, MA -- A line of vacuum pump inlet traps for processes that create large volumes of ..... which generate high solids, these traps help reduce vacuum pump failures. Capable of up to 2,500 in3 of solids accumulation …
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MV launches multi-trap vacuum pump inlet for 300mm wafer fabrication process
MV Products has announced that their high-capacity, modular vacuum pump inlet-exhaust traps can be stacked for semiconductor wafer fabrication processes which produce a lot of heavy particulates …
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Modified pump, trap system cuts down PECVD maintenance
… maintenance issues for vacuum pumps and downstream exhaust ..... maintenance issues for vacuum pumps and exhaust gas-abatement ..... Scotland, this meant that vacuum pumps needed servicing as ..... Our goal was to extend vacuum pump and TPU service intervals …
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Exhaust filter
… Exhaust filter A high-capacity vacuum pump exhaust filter that prevents oil ..... Oil Mist Eliminator forces the vacuum pump exhaust through a positively sealed ..... Designed for high-capacity vacuum pumps with ports up to 3 in. diameter …
