Vacuum Pump
Vacuum Pump news and technical articles from Solid State Technology Magazine. Search Vacuum Pump latest and archived news and articles
-
Vacuum pumps improve throughput by 90% with new rotary design
… nearly 90% percent in maximum gas flow, compared to existing vacuum pump products, the company reports. The pumps’ fully integrated ..... the connection cable and rack conventionally required for vacuum pumps . This reduces the vacuum system footprint in the fab, and …
-
Benchtop vacuum degassing chamber aids slurry, epoxy, etc research
… Its VisiTrap foreline trap protects vacuum pumps from vapors. The benchtop degas vessel ..... Degassing Chamber connects directly to a vacuum pump . It has perforated shelves in the 4 ..... of Mass-Vac Inc., which provides vacuum pump products, support, and services …
-
Defect removal using dry cryogenic aerosols
… particles (and aerosol clusters) away from the wafer. Defects entrained in the gas flow are removed from the chamber by a vacuum pump . The aggressiveness of the cryogenic aerosol is controlled to optimize the cleaning process and balance particle removal …
