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Asahi Kasei E-Materials Corporation purchased an IQ Aligner UV nanoimprint lithography (UV-NIL) system from EV Group (EVG).
EV Group signed a joint-development and licensing agreement with Eulitha AG, integrating Eulitha's PHABLE mask-based UV photolithography technology with EVG's automated mask aligner platform.
March 8, 2001--Santa Clara, California--Intel Corp. today announced that its researchers have developed and delivered the first industry-standard format photomasks for extreme ultraviolet (EUV) lithography. This marks a significant milestone in the demonstration of EUV as the next generation ...
formed private corporation, United States Advanced Lithography, is seeking $50 million in funding to develop extreme UV lithography under license from the Extreme UV Limited Liability Corp. (EUV LLC), and will also keep open the possibility of
Falling in line with other extreme- UV lithography development programs, CEA, France's atomic energy agency, has embarked on its own EUV effort, with an initial goal of developing
silicon ribs with the height of 170nm are patterned on a silicon slab with the thickness of 50nm using 248nm deep- UV lithography and inductively-coupled plasma etching. Following the etching, the p-i-n junctions are formed by patterned
research facilities) develop EUV lithography. The national project, part of the European "EXEPT" project (EXtreme- UV lithography Entry Point Technology development) and the CATRENE Cluster, was supported with ~€16M from the German Federal
lithography tools and the company's Yieldstar S200 metrology platform. ASML preproduction scanner NXE:3100 for extreme UV lithography , installed at imec’s 300mm cleanroom. (Source: IMEC) "Imec has been a development center for ASML to test
know that it's that Paulson the seventeen time for him the one that went with. April 2. So. I'm last about UV lithography and what happens if that's not ready programs poised to you know. I jump in if you will yes I'm. Really we really
chains. For more information, visit www.semi.org More SEMICON Japan news and product launches: EVG installs UV - lithography system at Asahi Kasei Ushio releases lithography tools for MEMS, power device, and LSI fab EVG doubles process