Uv Lithography news and technical articles from Solid State Technology Magazine. Search Uv Lithography latest and archived news and articles
Asahi Kasei E-Materials Corporation purchased an IQ Aligner UV nanoimprint lithography (UV-NIL) system from EV Group (EVG).
EV Group signed a joint-development and licensing agreement with Eulitha AG, integrating Eulitha's PHABLE mask-based UV photolithography technology with EVG's automated mask aligner platform.
chains. For more information, visit www.semi.org More SEMICON Japan news and product launches: EVG installs UV - lithography system at Asahi Kasei Ushio releases lithography tools for MEMS, power device, and LSI fab EVG doubles process
lithography tools and the company's Yieldstar S200 metrology platform. ASML preproduction scanner NXE:3100 for extreme UV lithography , installed at imec’s 300mm cleanroom. (Source: IMEC) "Imec has been a development center for ASML to test