Transmission Electron Microscopy
Transmission Electron Microscopy news and technical articles from Solid State Technology Magazine. Search Transmission Electron Microscopy latest and archived news and articles
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Evolution or revolution: the path for metrology beyond the 22nm node
… spatial resolution. SSRM has demonstrated excellent performance in conjunction with 3D-APT and SIMS [6]. Transmission electron microscopy (TEM) techniques such as energy-dispersive X-ray (EDX) and electron energy-loss spectroscopy (EELS …
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Semiconductor metrology beyond 22nm: FinFET metrology
… spatial resolution. SSRM has demonstrated excellent performance in conjunction with 3D-APT and SIMS [6]. Transmission electron microscopy (TEM) techniques such as energy-dispersive X-ray (EDX) and electron energy-loss spectroscopy (EELS) are valuable …
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Norcada microporous silicon nitride sample holders suit thin film study
January 17, 2012 - PRLEAP.com -- Norcada launched 2 microporous silicon nitride transmission electron microscopy (TEM) sample holders, suiting atomic layer deposition (ALD) analysis, thin film growth, and other applications under TEM …
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SEM tweak enables crystal study of particles as small as 10nm
… so small that you're getting information about the sample holder instead," report the researchers. Transmission electron microscopy (TEM) performs better with samples to about 50nm in size, below which they show very limited diffraction …
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Scatterometry measurement for gate ADI and AEI CD of 28nm metal gates
… ADI and AEI structures. We also planned to compare metal gate AEI scatterometry measurement results to transmission electron microscopy (TEM) reference measurements. This evaluation process was designed to demonstrate the ability of this …
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Silicon/polymer combo offers lithium-ion batteries higher capacity
… transport to the silicon particles. Figure 3. Transmission electron microscopy reveals the new conducting polymer’s ..... volume. Scanning electron microscopy and transmission electron microscopy at the National Center for Electron Microscopy …
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Scan diagnostic analysis assists SoC fab debug/process monitoring
… library cell. A highly resistive via was measured through atomic force probing (AFP), and energy filtered transmission electron microscopy (EFTEM) cross-sections revealed an oxygen rich interfacial layer ( Fig. 1 ). Figure 1. Cell clock …
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Imec performs selective CVD of GeSN
… precursors, respectively. The precursor stability enabled a 40nm GeSn layer without defects (inspected via transmission electron microscopy ) on a Ge substrate. X-ray diffraction reciprocal space mapping (XRD-RSM) measurements show that …
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Semiconductor yield improvement with scan diagnosis
… step. Delayering, optical microscopy (OM), cross-sectioning, scanning electron microscopy (SEM), transmission electron microscopy (TEM) analysis, and other chemical process are used. The last stage is to identify the physical root …
