Substrate Inspection
Substrate Inspection news and technical articles from Solid State Technology Magazine. Search Substrate Inspection latest and archived news and articles
-
Holistic substrate inspection for defects at the 32nm node and beyond
… which will be used in most emerging high-volume consumer applications, will be affected. A new approach to substrate inspection is needed. Better information, better judgment The main goal of any wafer-inspection operation is to search …
-
Holistic substrate inspection for defects at the 32nm node and beyond
… which will be used in most emerging high-volume consumer applications, will be affected. A new approach to substrate inspection is needed. Better information, better judgment The main goal of any wafer-inspection operation is to search …
-
Next–Generation Lithography: EUVL readiness for pilot line insertion
… too small to be detected by the substrate inspection tool, but are found by the mask ..... this approach is still feasible for substrate inspection , due to potential damage to the ..... industry needs a next–generation substrate inspection tool by late 2009/early 2010 …
-
Moritex upgrades MEMS inspection system
… chipping detection after wafer dicing, Sacrificial oxide layer etching non-destructive measurement, power device substrate inspection , bare wafer evaluation tests, bonding shift measurement, and SOI active layer thickness measurement. The …
-
SEMATECH takes on funding challenge for EUV mask infrastructure
… address the short-term need for a pilot line (by 2011), "SEMATECH is funding a supplier to build an optical substrate inspection (at-wavelength) tool," said Rice. The same goes for an aerial image tool (at wavelength) for defect …
-
Evaluating-polymer-wear-and-particulation-for-semiconductors and data storage
… Identify events that cause the wear rate to change Sample inspection by optical microscopy Determine if GMF occurs Substrate inspection by optical microscopy Identify transfer layers Determine size and shape of wear debris Total number of particles …
-
Lithography perspective for the 22nm half-pitch
… technical working group has reached consensus on tool specifications for pilot line and 22nm hp HVM, including mask substrate inspection (optical), mask blank inspection tool (actinic and optical), aerial imaging (actinic), and patterned …
-
New Surfscan SP2XP summons ghosts from the haze
… and the system's output data files are in standard KLARF. The technology will be extended beyond bare- substrate inspection to the large number of blanket film tool-monitoring applications required in semiconductor manufacturing …
-
Double, double, toil and trouble!
… the system’s output data files are in standard KLARF format. The technology will be extended beyond bare- substrate inspection to the large number of blanket film tool-monitoring applications required in semiconductor manufacturing …
-
Wafer Scale Bump Inspection System
… inspecting and reporting on 3000 bumps/sec. The IBIS range now comprises prototype and production size units for substrate inspection in the form of IBIS-lab and IBIS while the Versalea will be capable of handling 300 mm diameter wafers and …
