Subfab
Subfab news and technical articles from Solid State Technology Magazine. Search Subfab latest and archived news and articles
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Applied Materials iSYS Integrated Subfab System wins SEMICON West Sustainable Technologies Award
… Inc. is the recipient of its 2010 SEMICON West Sustainable Technologies Award in recognition of the Applied iSYS Integrated Subfab System. The Sustainable Technologies Award winner was selected with technical guidance from a panel of technology industry …
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Subfab sync increases energy savings
… wafer processing facility energy is consumed in the subfab . Reducing subfab energy consumption per wafer pass without compromising ..... desirable and achievable. Synchronization of discrete subfab components and integration with process tool interfaces …
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Energy-saving subfab controller enables idle mode
… provide a signal for standby control to the subfab abatement equipment with configurable ..... vacuum pumps and abatement systems in their subfab consumed the same amount of energy whether ..... communication on the tool status with the subfab . Leti and Edwards, for whom energy efficiency …
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Increasing Energy Efficiency
… literally beneath their own feet, in the subfab . Through the use of a central control system, equipment in the subfab such as vacuum pumps and process exhaust ..... addition to saving energy, syncing up the subfab with process tools also offers significant …
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Air management techniques can reduce costs and optimize fab performance
… support floor into a clean-classified subfab space. In the 25 percent filter-coverage ..... beneath the access floor, allowing the subfab to be non-classified. For both cases ..... drawn into the apparatus from the clean subfab and is discharged directly into the supply …
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National Semiconductors new 200 mm fab rises despite record winter
… building. So the plan was to build the subfab first. But before construction could ..... Click here to enlarge image Above the subfab , which contains the fab`s "dirty ..... pouring of concrete and completion of the subfab on three levels -- waffle table, return …
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Keeping pace with Moore's Law
… 3m wide with weights up to 8.4kg. Subfab equipment has also increased in size and ..... tool packing even with the larger fab and subfab footprints, many 300 mm tools have bottom ..... Regarding tool issues specific to retrofits: Subfab components will still fit in the tool …
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Tool hookup: a paradigm shift to modularization
… hookup. Figure 2. Conceptual design of how floor modules and subfab utility racks can be used to standardize on-tool installations ..... the tool type, and reduce space requirements at the fab and subfab level. Click here to enlarge image In addition to the cost …
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Real-time CMP monitoring tracks LPCs
… multiple customers in the US and Asia, taking samples from both IC and slurry companies. So far data collection has been in the subfab where slurry distribution lies come from the tank and go out to the fab area -- not on the platen at actual production, which …
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Real-time CMP monitoring tracks LPCs
… multiple customers in the US and Asia, taking samples from both IC and slurry companies. So far data collection has been in the subfab where slurry distribution lies come from the tank and go out to the fab area—not on the platen at actual production, which …
