Silicon On Insulator
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EVG tool bonds 450mm SOI semiconductor wafers
… MEMS, nanotechnology and semiconductor manufacturing tool supplier, released a wafer bonding system for 450mm silicon - on - insulator (SOI) wafers: EVG850SOI/450-mm. The automated tool runs at production line speed and comprises a cleaning …
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EVG wins SOI order from Shenyang Silicon Technology
… Shenyang Silicon Technology Co. Ltd. (SST). SST will use an EVG850LT automated production bonding system for silicon - on - insulator (SOI) wafers in its state-of-the-art SOI production facility to expedite its efforts to ramp up high …
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Soitec platform enables planar FD technology
… Group (Euronext Paris) released the Ultra-Thin Buried Oxide (UTBOX) extension to its Ultra-Thin (UT) silicon - on - insulator (SOI) platform, a robust substrate solution for chip designers tackling the performance, power and density …
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Study compares SOI vs. bulk for finFETs
October 23, 2009 - The SOI Industry Consortium has released results from a study comparing silicon - on - insulator (SOI) and bulk finFETs , determining that cost and performance are "for all practical purposes equivalent," but finFETs are …
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20nm fully depleted SOI process available via CEA-Leti and CMP
… at Tokyo University the launch of an Exploratory multi project wafers (MPW) initiative based on fully depleted silicon on insulator (FDSOI) 20nm process, opening the access of its 300mm infrastructure to the design community. This MPW offer …
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IBM to adopt SIMOX material
… adopt SIMOX material In a move that boosts both silicon - on - insulator technology in general, and the SIMOX method of ..... wafers." IBM`s recent announcement of its silicon - on - insulator plans has prompted a number of current SOI users …
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SOI wafers: Fabrication techniques and trends
… CMOS technology in 1978, silicon - on - insulator (SOI) offered the potential ..... trademark of S.O.I.TEC Silicon On Insulator Technologies. ELTRAN is a ..... Cristoloveanu, "Frontiers of Silicon - on - Insulator ," J. Appl. Phys. , 93 …
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A Novel Method to Prepare Wafers with Very Low COPs for Bonded SOI
Overview The adoption of silicon - on - insulator (SOI) wafers is clearly part of the future of ..... better control of COPs in wafers is their effect on silicon - on - insulator (SOI) wafers. For example, the presence of …
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Soitec, AMD extend 300mm wafer pact
… France, has signed a $150 million deal to supply silicon - on - insulator wafers to AMD, extending a $50 million pact ..... a multiyear contract to supply 200mm and 300mm silicon - on - insulator wafers, manufactured using Soitec's Smart Cut …
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MEMC suing Soitec over "perfect silicon"
… Soitec alleging infringement of European patents concerning defect-free ("perfect") silicon used in making silicon - on - insulator wafers. The lawsuit follows a seizure of product from Soitec's facility in Bernin, France, on Dec. 15 …
