Silicon Etching
Silicon Etching news and technical articles from Solid State Technology Magazine. Search Silicon Etching latest and archived news and articles
-
Gas-based etch enables MEMS materials flexibility, commercial reliability at Fraunhofer
… gasses allow greater materials flexibility. Learn more at http://www.fraunhofer.de/en/ Also read: Deep silicon etching used for key MEMS building blocks by Trikon Technologies Subscribe to our MEMS Direct newsletter
-
AVS Symposium 2011: A pre-show highlight reel
… transistor), with 14nm/10nm fabricated prototypes MEMS and NEMS : Scallop-free TSV etching for 3D LSI; deep silicon etching with STiGer process; alternative passivation chemistries for TSVs; wafer-scale hermetic packaging for MEMS; Plasma …
