Silicon Etching
Silicon Etching news and technical articles from Solid State Technology Magazine. Search Silicon Etching latest and archived news and articles
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Deep silicon etching used for key MEMS building blocks
Etch requirements for four basic deep Si processes — bulk, precision, SOI, and high aspect ratio — are presented and contrasted.
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PCB-Piezotronics-begins-MEMS-production-taps-Plasma-Therm
… Development and production of these sensors used a Plasma-Therm VERSALINE DSE system for several critical deep silicon etching fabrication steps. PCB’s MEMS-based sensor products include a series of shock accelerometers utilized in industrial …
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Alcatel receives DRIE systems order from CMOS image sensors foundry Xintec
Oct. 9, 2006 -- Alcatel Micro Machining Systems , an Annecy, France, supplier of deep silicon etching equipment (DRIE) for MEMS and 3D Semiconductors, announced that it has received a multi-million dollar order from Xintec Inc …
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Manufacturing integration considerations of through-silicon via etching
… been used extensively for deep silicon etching in memory and MEMS production ..... chemically reactive species. In deep silicon etching , the primary source gas used ..... sidewall passivation for deep silicon etching ; the first is the conventional …
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Meeting deep silicon etch challenges for silicon MEMS devices
… 12µm/min can be obtained. Silicon etching and profile control Figure 1. SEM ..... generally accepted for deep silicon etching , results in the formation of ..... The cyclical process of deep silicon etching puts unique demands on common …
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Through-wafer Via Etching
… stacking processes, the ideal silicon etching process is anisotropic (highly ..... packaging processes. The range of silicon etching processes under investigation ..... alternating process steps of silicon etching and protective polymer deposition …
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MiQro Innovation Collaborative Center adds process tools, MES to MEMS facility
… with an APM unit for plasma-enhanced CVD (PECVD). The system is used in multiple process steps including deep silicon etching , patterning of aluminum-based metals for interconnect, and the formation of aluminum nitride (AlN) bulk acoustic …
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Gas-based etch enables MEMS materials flexibility, commercial reliability at Fraunhofer
… gasses allow greater materials flexibility. Learn more at http://www.fraunhofer.de/en/ Also read: Deep silicon etching used for key MEMS building blocks by Trikon Technologies Subscribe to our MEMS Direct newsletter
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AVS Symposium 2011: A pre-show highlight reel
… transistor), with 14nm/10nm fabricated prototypes MEMS and NEMS : Scallop-free TSV etching for 3D LSI; deep silicon etching with STiGer process; alternative passivation chemistries for TSVs; wafer-scale hermetic packaging for MEMS; Plasma …
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Observations on the chemistry and physics of STI etch in Cl 2 -Ar plasmas
… the source plasma conditions. Silicon etching in chlorine plasmas The etching ..... the system considered here ( silicon etching in a Cl 2 -Ar plasma), the ..... Etching. II. Polycrystalline Silicon Etching ," J. Vac. Sci. Technol …
