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Pvd news and technical articles from Solid State Technology Magazine. Search Pvd latest and archived news and articles

  1. PVD handbook updated with cost and performance focus

    Article

    Tue, 28 Feb 2012

    Handbook of Physical Vapor Deposition ( PVD ) Processing, Edition No. 2 has been released, covering all aspects of PVD process technology, from characterization ..... It includes the latest developments in PVD process technology. The book covers substrate

  2. Chinese GaAs foundry installs SPTS PVD tool

    Article

    Tue, 15 May 2012

    a Sigma f xP physical vapor deposition ( PVD ) system at a Chinese foundry producing ..... gallium arsenide (GaAs) substrates. The PVD system will be used to deposit front and ..... cluster tool designed for high-volume PVD processing, supporting various process

  1. Materion expands PVD shield cleaning facility in NY

    Article

    Fri, 6 Jan 2012

    cleaning and surface treatment of physical vapor deposition ( PVD ) shield kits. The NY facility serves manufacturers of LEDs ..... dimensional tolerances and complete cleanliness. Parts are returned to PVD users ready to be installed into thin film chambers for deposition

  2. Vacuum conference highlights PV fab, PVD coating

    Article

    Tue, 19 Apr 2011

    includes 2 new symposia covering photovoltaics manufacturing and PVD coating advances and its future outlook. Over the entire event ..... vacuum coating technologies will be compared with existing PVD and other vacuum-based processes. The outcome will provide

  3. Veeco ion beam deposition tool matches PVD speed

    Article

    Mon, 16 Apr 2012

    manufacturing process compared to physical vapor deposition ( PVD ) , evaporative coatings, and ion-assisted deposition. Veeco ..... achieving accelerated deposition rates at speeds comparable to PVD . It delivers an increased deposition rate on lot sizes up to

  4. AMAT's DRAM fab tools for denser transistors

    Print

    Thu, 1 Sep 2011

    insulator scaling, the Endura HAR Cobalt PVD system for high-aspect-ratio (HAR) contact structures, and the Endura Versa XLR W PVD system for reduced gate stack resistance ..... scaling challenges are the Endura HAR Cobalt PVD tool for periphery contacts, and the Endura

  5. AMAT debuts DRAM fab tools for denser transistors

    Article

    Wed, 6 Jul 2011

    scaling; the Applied Endura HAR Cobalt PVD system for high-aspect-ratio (HAR ..... structures; and the Applied Endura Versa XLR W PVD system for reduced gate stack resistance ..... metallization on the Applied Endura Cobalt PVD system. Uniform cobalt films are deposited

  6. TEL acquires advanced packaging tool supplier NEXX

    Article

    Fri, 16 Mar 2012

    electrochemical deposition (ECD) and physical vapor deposition ( PVD ) tools, for wafer-level packaging (WLP) . TEL is acquiring ..... packaging interconnect toools. TEL praised NEXX's ECD and PVD technologies for high performance, low cost of ownership, development

  7. CIGS solar cell alternative aim for imec and Flamac

    Article

    Wed, 28 Dec 2011

    materials. The team will use a new physical vapor deposition ( PVD )/plasma-enhanced chemical vapor deposition (PECVD) tool at Flamac for the study. With 8 process chambers, the automated PVD /PECVD tool deposits various thin film materials onto substrates

  8. IR orders NEXX metallization systems for IGBT fab

    Article

    Thu, 1 Dec 2011

    IRF ) purchased multiple Apollo physical vapor deposition ( PVD ) systems from packaging equipment maker NEXX Systems for its ..... temperature anneal processing. IR qualified and ordered Apollo PVD systems because they enable cutting-edge advanced packaging

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