Projection Lithography
Projection Lithography news and technical articles from Solid State Technology Magazine. Search Projection Lithography latest and archived news and articles
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Ushio 200mm litho tool suits 3D packaging steps
September 7, 2011 -- Ushio Inc. debuted a 200mm wafer full-field projection lithography (FFPL) tool UX4-3Di FFPL 200 for high-volume manufacturing of advanced large scale integration (LSI) devices incorporating …
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Ushio releases lithography tools for MEMS, power device, and LSI fab
… of modular full-field projection lithography tools. One is the UX4 ..... 200mm-wafer, full-field projection lithography tool for manufacturing MEMS ..... compatible, full-field projection lithography tool for manufacturing power …
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SEMICON West 2011: New product roundup
… snapshot method makes high-speed measurements possible. Ushio A new 200mm version of the UX4-LEDs full-field projection lithography tool (the 150mm tool was released in Nov.2010) can achieve a high throughput of 120 wafers/hour, using …
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Projection litho tool lowers CoO for HB-LED manufacturing
… at SEMICON West 2011. With a low NA, good DoF, and the resolution required for HBLED applications, the 1X projection lithography tool eliminates the consumable costs (for masks) associated with contact aligners because the masks don't …
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LED makers shifting focus from efficacy to manufacturing efficiency for mass-market leap
… option for lower-cost ways to make patterned sapphire substrates is to use common proximity printers instead of projection lithography . SUSS Microtec suggests the 1-2μm feature-size hexagonal pattern etch layer can be printed on sapphire …
