Production Tool
Production Tool news and technical articles from Solid State Technology Magazine. Search Production Tool latest and archived news and articles
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IMEC to acquire EUV pre-production tool from ASML
… an ASML EUV pre- production tool in IMEC's 300 mm ..... installation of the pre- production tool follows ASML's ..... infrastructure, the pre- production tool will exhibit considerably ..... the early EUV pre- production tools . Such advanced tools …
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SPIE 2011: Where are we now with EUV?
… tangibly, there has been notable year-over-year progress in EUV. Two pre- production tools have now been shipped, and we could get word of production tool shipments at next year's conference. However, on a deeper and more sobering …
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SPIE 2011: Where are we now with EUV?
… there has been notable year-over-year progress. Two pre- production tools have now been shipped, and with more than a little luck we could get word of production tool shipments at next year's conference. However, on a deeper and …
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Faulty logic in production tool development will lead to poor results
… to develop that next-generation production tool . Ironically, companies that are ..... film technology area. Successful production tool development is possible, however, if ..... probably the most common error in production tool development. In most cases, the …
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Tackling the TSV Checklist
… materials issues Develop high-volume production tools that meet yield and throughput requirements ..... development of EDA tools and high-volume production tools . EDA Tools This week, a joint announcement ..... design rule check, etc. High-volume Production Tools As the race to develop high-end …
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Roll-to-roll presents flat-panel display sector with new manufacturing option
… will enable R2R for displays. While the initial prototype production tools planned for CAMM's R&D line are expected to be a ..... that photolithography steppers could prove to be a viable production tool for R2R lines. In initial tests, Azores has developed …
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Roll-to-roll presents flat-panel display sector with new manufacturing option
… will enable R2R for displays. While the initial prototype production tools planned for CAMM’s R&D line are expected to be a “stepping ..... that photolithography steppers could prove to be a viable production tool for R2R lines. In initial tests, Azores has developed …
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The status and future of APC software
… semiconductor manufacturing, real-time control is part of production tool architecture, providing accurate and repeatable recipe ..... strongly relied on their ability to select best-of-breed production tools for their new fabs. Today's advanced wafer fabs have …
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Automation and Control for 300-mm Process tools
… hope to see them in the next generation 300-mm volume production tools . The complexity and breadth of software applications will ..... and improve its immediate productivity. Forty percent of production tool downtime is currently attributed to control software failure …
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Trends in contamination control in IC production tools
Trends in contamination control in IC production tools E.H.A. Granneman, ASM International, Bilthoven ..... University Delft, Delft, The Netherlands Many modern IC production tools allow intratool storage and transport in very pure nitrogen …
