Plasma Etching
Plasma Etching news and technical articles from Solid State Technology Magazine. Search Plasma Etching latest and archived news and articles
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Plasma etch challenges for FinFET transistors
… overcome transistor scaling issues [1], additional etch challenges have appeared that may require new approaches to plasma etching . Compared with planar transistors, the performance of FinFET devices will depend more on etch because the multiple …
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BC discovers CNT's 3 growth phases during PECVD
… nanotubes to an integrated circuit in order to draw away heat and efficiently cool the device. After ten minutes of plasma etching , the early stage nanotubes have been washed away and the third stage tubes begin to emerge in tall, ordered rows …
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Graphene doping doesn't need its own step when done on the edge
… be done as part of other fabrication steps such as plasma etching , and that will require us to reinvent the whole process ..... Tech. Doping treatment could also be applied using plasma etching , Brenner said. Controlling the specific atoms used …
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SEMICON West 2011: New product roundup
… thermoset polyimide material is used in structural components (e.g. insulators, isolators, and retainers) in plasma etching equipment, such as plasma enhanced chemical vapor deposition (PEVCD), and high-density plasma chemical vapor …
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Argon increases silicon etch rate 4x
… published in Microelectronic Engineering: Effect of alternating Ar and SF6/C4F8 gas flow in Si nano-structure plasma etching , L. Chen, V. Luciani, and H. Miao, Microelectronic Engineering 88, 2470-2473 (2011). Access it here …
