Plasma Deposition
Plasma Deposition news and technical articles from Solid State Technology Magazine. Search Plasma Deposition latest and archived news and articles
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Plasma deposition /etch
Plasma deposition /etch
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Dielectric anti-reflective coatings for DUV lithography
… by combining theoretical models from photolithography simulators with the manufacturing capabilities of silane-based plasma deposition chambers. By following the three steps outlined, the design of these ARCs can be made available to any semiconductor …
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CSquared Innovations wins Next Gen Manufacturing cash
… start-up venture that Mohanty founded in 2010 with his three-person team, is deploying laser-assisted atmospheric plasma deposition technology which offers a high-speed, cost-effective and highly scalable platform approach to the synthesis of nanostructural …
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SENTECH will present SenSol Haze at EU PVSEC 2010
… Metrology (reflectometer, ellipsometer, spectroscopic ellipsometer) and Plasma Process Technology (plasma etcher, plasma deposition systems). Visit SENTECH Instruments at the 25 th EU PVSEC in Valencia, Spain, September 6-9, on booth L2/H4 …
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Axic Inc
Produces, Plasma deposition (PECVD), etching (RIE and ICP) and cleaning-photo resist stripping systems. Also have sputtering and evaporation systems. New and refurbished systems available. RTP equipment for R&D applications provided.
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Japan players bet big on emerging thin-film solar
… Makoto Tanaka noted the company is focusing on improved microcrystalline silicon material, for which it has developed a plasma deposition technology with what he says is 10× better throughput. The plan is to use the microcrystalline film in a tandem structure …
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Product News
… maintenance-free and battery-free and is dedicated to metal, dielectric or poly-etch, ion implantation, sputtering, and plasma deposition . Alcatel Vacuum Technology France, Annecy, France; ph 33/45065-7777, www.adixen.com. Software suite allows …
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Dow Corning introduces surface engineering platform
… PlasmaStream's precursor polymerization and coating process is designed to be gentler than conventional plasma deposition processes which typically damage or destroy the precursor molecules, along with their functionality and …
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Japan players bet big on emerging thin-film solar
… Makoto Tanaka noted the company is focusing on improved microcrystalline silicon material, for which it has developed a plasma deposition technology with what he says is 10× better throughput. The plan is to use the microcrystalline film in a tandem structure …
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Air Products finishes N 2 O expansion in Taiwan
… used with silane for CVD of silicon nitride layers, used as passivation, masking, or insulating layers. It's also used for plasma deposition of fused silica glass as a low- k dielectric insulating film between adjacent metal lines.
