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Pattern Inspection

Pattern Inspection news and technical articles from Solid State Technology Magazine. Search Pattern Inspection latest and archived news and articles

  1. Making EUV work, with a subsystem ear: Interview with SEMATECH's Stefan Wurm

    Article

    Fri, 30 Sep 2011

    … development program in May of this year, intending to develop the technology by 2014, and produce an EUV mask pattern inspection tool by 2015 for 16nm work. ( News Alert: Wurm hinted that there will be an update on the AIMS work during next …

Related Topics:

  1. Mask Inspection
  2. Defect Inspection
  3. Wafer Inspection
  4. Inspection Equipment
  5. Inspection System
  6. Inspection Modules
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