Particle Detection
Particle Detection news and technical articles from Solid State Technology Magazine. Search Particle Detection latest and archived news and articles
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Enhanced particle detection unit goes down to 5um defects
… high resolution, Dr. Schenk has developed an enhanced version of the Pollux Particle Detection System for Photomasks. Pollux-Enhanced automated particle detection system enables fabs to perform a complete inspection on each reticle prior to …
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Two researchers unveil springboard to new particle detection systems
… springboard—literally—to new particle detection systems. A similar scheme ..... technique could be used for particle detection of airborne contaminants ..... microelectromechanical systems (MEMS), for particle detection applications.
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Novel analyzer adds scientific edge to particle detection
Novel analyzer adds scientific edge to particle detection Boston William Reentz, a chemist at Bell Labs, the R&D arm of Lucent Technologies, says the particle detection process in semiconductor manufacturing is more like …
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Particle detection systems/tools, masks/reticles
Particle detection systems/tools, masks/reticles
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Advanced wafer inspection system achieves 40nm particle detection capability
Westwood, Massachusetts--ADE Corp., working on a development program with Super Silicon Crystal Research Institute Corp. (SSi) in Japan, says that it has produced a system capable of detecting 40nm particles--required for meeting the 0.10-micron technology node.
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Current and future defectivity issues for equipment components and materials
… Nanodefect Center is tackling the big challenges in particle detection , characterization and mitigation for critical supply ..... developed by SEMATECH to tackle the big challenges in particle detection , characterization and mitigation for critical supply …
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Zeiss touts particle analysis add-on for SEMs
… introduced a software package that consolidates automatic particle detection , investigation, and characterization capabilities ..... and energy dispersive X-ray (EDX) analysis for particle detection and characterization. A "border particle stitching …
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Detecting Contamination in Semiconductor Processing is Key for Particle Counters
… for Particle Counters Surface particle detection is the "first line of defense ..... for the 21st century" and particle detection as the first line of defense ..... control technology-- surface particle detection . The development of instrumentation …
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In situ process could cause scientific revolution
… process could cause scientific revolution A mobile instrument being rolled around Bell Labs could change in situ particle detection during wafer processing from an art to a science and could have a major impact on semiconductor manufacturing …
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Metrology method measures
… small. W.L. Gore and CT Associates developed a particle detection technique that allows filter makers to measure retention ..... accurately sized and counted using conventional aerosol particle detection instrumentation. This method was used to evaluate …
