Multilayer Film
Multilayer Film news and technical articles from Solid State Technology Magazine. Search Multilayer Film latest and archived news and articles
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All-optical wafer measurement system
All-optical wafer measurement system Impulse 300 performs nondestructive multilayer film thickness and uniformity measurements on semiconductor wafers. The system uses lasers to provide noncontact ?-level repeatability …
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Flexible CIGS PV:a new show coming soon to a rooftop near you
… for the light soak effect in CIGS cells. Moisture ingress that is prominent due to the granular structure of the multilayer film stack of the cell: this leads to the substantial changes in sheet and shunt resistance lowering power conversion efficiency …
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Combined reflectometry-ellipsometry technique to measure graphite down to monolayer thickness
… software simultaneously solves for refractive index n(λ), extinction coefficient k(λ), and thicknesses of multilayer film structures. A self-consistent solution is obtained using the SCI generalized dispersion formula to model fitted values …
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Analyzing Si-based structures in 3D with a laser-pulsed local electrode atom probe
… was set at 40K for all laser-pulsed experiments. All concentrations in this paper are quoted in atomic percent. Multilayer film stacks of Si-SiGe were deposited at a low enough temperature that minimal diffusion was expected to have occurred during …
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Meeting challenges for engineering the gate stack
… electrical characterization of dielectric films and interfacial layers. Techniques such as using XPS for compositional and multilayer film thickness analysis and EM-probe measurement for gate leakage are needed. It was observed that film compositional uniformity is key in realizing …
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Deep-UV step-and-scan system
… from seven diffracted orders separately at each wavelength. This provides a larger process window for more complex multilayer film stacks, including advanced CMP and copper metallization processes. ASM Lithography, Veldhoven, The Netherlands …
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Inventors' competition lauds small breakthroughs
… biological and chemical agents. She made the discovery when a silicon chip accidentally broke in the process of making a multilayer film of porous silicon on crystalline substrate. She found that she could make the particles different colors and program …
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New Products
… uniformity, high repeatability, and low particulate deposition. The system deposits extremely thin single- and multilayer film coatings with angstrom accuracy. Its modular architecture also allows clusterability with other process modules for …
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Picosecond sonar used to characterize copper processes
… makes the technique ideal for single-layer and multilayer Ta and TaN barrier process optimization and control. This multilayer film measurement capability also allows for the simultaneous characterization of seed copper/barrier film stacks, eliminating …
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New Products
… advanced dispersion models and an absolute reflectivity measurement technique to measure a majority of the single- and multilayer film stacks used in IC production. Throughput is >200 wafers/hour. NanoSpec 9300 is an automated, noncontact thin …
