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  1. Entegris builds advanced filtration and contamination control R&D center for 2X, 1X semiconductor fab

    Article

    Thu, 12 Apr 2012

    matter and bubbles. In gas purification, airborne molecular contamination is a problem Entegris will aggressively address, said ..... time includes extensive specifications for airborne molecular contamination . Entegris is working on these “red bricks” with

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