Microlithography
Microlithography news and technical articles from Solid State Technology Magazine. Search Microlithography latest and archived news and articles
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Microlithography handbook
Microlithography handbook This 776-page volume titled Handbook of Microlithography , Micromachining, and Microfabrication: Volume 1, Microlithography covers all aspects of microlithography as applied to microelectronics. Topics include optical …
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Microlithography cluster
Microlithography cluster The Polaris 2500 microlithography cluster has been designed for the needs of 0.18-?m photoresist processing. The thermal process stations are packaged in six bake/chill and prime/chill pairs, vertically stacked …
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Microlithography process development with lithography simulation
… Peter Brooker, Bob Naber, Sigma-CAD, Santa Clara, California Uli Hofmann, Sigma-C, Munich, Germany Microlithography simulation has become essential in the last decade, driven by the increasingly challenging lithography requirements …
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SPIE Microlithography Report: LIL may bridge 157nm, EUV gap
Although there were mixed messages about an uncertain lithography future at the SPIE Microlithography Symposium in Santa Clara, CA, Feb. 23–28, it appears that immersion optics may save the day. Nikon showed a revised roadmap …
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Anadigics Adds Microlithography Equipment
MINNEAPOLIS, Minn. Aug. 23, 2000 FSI International announced that Anadigics Inc. has placed an order for an FSI microlithography system for use used to manufacture 6-inch GaAs wafers. By pennNET Staff
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Getting small at SPIE Microlithography
Every year, experts troop to Silicon Valley for the SPIE International Symposium on Microlithography . It is an opportunity to learn from one’s peers just what has been going on in fabs and labs around the world. Every year …
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Microlithography for on-chip high-Q inductors
… of the circuit doesn’t increase the die area. Therefore, inductor technology poses severe challenges to the microlithography of packaging films that can be up to 20µm thick. Figure 1. Schematic representation of an on-chip high-Q …
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2002 Microlithography Symposium: Lithographers fight upstream
… talk. The coming troubles were apparent at the 27th SPIE Microlithography Symposium in Santa Clara last week. Lithographers are ..... week's WaferNews for Part 2 of the coverage of the SPIE Microlithography Symposium.)
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Corning Inc. to expand production of fluoride crystals for microlithography use
… capacity in fluoride crystals, which are used to make optical microlithography lenses. Construction will begin immediately and is expected ..... market through production of high quality HPFS material for microlithography equipment. By expanding into this next generation of material …
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A decade of changes
… since I took over the editorship of Microlithography World and began writing these editorials ..... seemed like a great opportunity! Microlithography World was already an established ..... changes are now catching up with Microlithography World and we need your input to adapt …
