Mfcs
Mfcs news and technical articles from Solid State Technology Magazine. Search Mfcs latest and archived news and articles
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Deep silicon etch from Oxford Instruments offers process flexibility
… increasing time between mechanical cleans. Features: Mechanical and electrostatic clamp Heated liners Fast acting closed coupled MFCs use software originally designed for atomic layer deposition Reduced chamber volume ensuring high gas conductance Active spacer …
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Product News
… SOI, it offers heated liners (for increased plasma stability and reduced polymer buildup), fast-acting closed-coupled MFCs utilizing ALD-designed software, and smaller chamber volume for higher gas conductance. "Active spacer" technology reduces …
