Metal Gate
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Improving workfunction control of metal gate electrodes
… devices require the introduction of metal gate (MG) electrodes for further performance ..... both the dielectric stack and the metal gate , followed by a high temperature treatment ..... interface between a gate dielectric and metal gate determines the effective workfunction …
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SEMATECH tips materials for nMOS metal -gate electrodes
… with nMOS transistors with high- k dielectric, a big step on the way toward fabricating working CMOS devices using metal gate and high- k dielectric stacks. High- k dielectrics have received much attention as an alternative to SiO2 gate dielectrics …
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ASMI: New ALD tool offers single-metal gate stack for 32nm HK+MG
… k cap layers that enable high- k metal gate stacks using a single metal, instead ..... process greatly simplifies the high-k metal gate integration and allows us to support ..... hafnium-based gate dielectric and metal gate allows atomic-level charges to …
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Intel announces high-k/metal gate breakthrough
… results of the company's high-k/ metal gate transistor development at the International ..... better results for NMOS high-k / metal gate transistors. For five years, Chau ..... materials and integrating them with metal gate electrodes. According to Ken David …
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CMP for metal -gate integration in advanced CMOS transistors
… volume manufacturing of high-k metal - gate (HKMG) CMOS transistors. The ..... fundamental device parameters. High- k metal - gate (HKMG) transistors were first ..... processing, depending upon whether the metal - gate is formed before or after the source …
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High-k metal gate characterization using picosecond ultrasonic technology
… instead, hence the name high- k metal gate (HKMG). Although at least one ..... primary challenge for the replacement metal gate aluminum CMP process. Non-uniform ..... deposited and post-CMP aluminum metal gate in order to fine-tune the Al growth …
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SST November 2007: Intel's evolution: Strained silicon to high- k and metal gate
… silicon dioxide dielectric, to metal gate and high- k dielectric. First ..... based high- k gate dielectric with metal gate electrodes. Gordon Moore has blessed ..... identified the elements of a high- k / metal gate transistor, and that the company …
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SEZ and Air Liquide team to develop etch solutions for advanced metal -gate materials
… end-of-line (FEOL) advanced metal - gate etch. High-k gate dielectrics and advance metal gate electrodes at the 45-nm technology ..... ruthenium (Ru) as an advanced metal - gate material, one of its inherent properties …
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TI readying 45nm process, mulling metal gate options
… silicidation-of-polysilicon (FuSI), or a combination of metal plus a silicide, to utilize a dual work function metal gate "at some point" in its 45nm technology roadmap. Doing so will achieve power consumption control without the need to …
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Intel announces high-k/metal gate breakthrough
… Robert Chau was to present results of Intel's high-k/ metal gate transistor development at the International Gate Insulator ..... new gate dielectric materials and integrating them with metal gate electrodes. According to Ken David, director of components …
