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alcohol process to deliver residue-free "etch release" to remove the sacrificial silicon oxide layers used in MEMS manufacturing . Using HF, the sacrificial layer is etched with high selectivity relative to the structural layer. "Considering
silicon fusion bonding and then wafer-scale packaging, MEMS manufacturing has had a lead over IC manufacturing. "Wafer-scale ..... manufacturing step. Reiterating a previous presentation ("New MEMS Manufacturing Technologies," Lindner et al., 7th International Conference
with Jazz Semiconductor to meet the requirements and challenges described above and to implement a scalable RF- MEMS manufacturing capability in Jazz’s 8-in. wafer foundry. Early process development and prototyping were done in a MEMS
registry is an important and critical component of yield in MEMS manufacturing . There are several key nodes in production flow where ..... production run. This level of automation is a first for MEMS manufacturing and enables hands-off operation of production wafer
A major high-volume MEMS maker has purchased a FOGALE nanotech T-MAP DUAL 3D 200A for its US manufacturing facility. The tool will be equipped with 2 load ports and will be fully automated.
Aug. 16, 2005 -- Akrion Inc . announced receipt of a purchase order for a GAMA Series pre-diffusion cleaning tool. The $2.5 million system will ship to a repeat customer's MEMS device manufacturing facility on the west coast of the United States. The company says the 200mm system incorporates its
Paula Doe, SEMI Emerging Markets, covers developments at Applied Materials, Coventor, and other members of the MEMS equipment supply chain that will make MEMS less expensive, smaller, and easier to manufacture.
Enpirion, Inc. entered into a strategic partnership agreement with JiangyinChangdian Advanced Packaging Co., Ltd. (JCAP) for the manufacturing of silicon-based magnetics utilizing Enpirion's proprietary micro electronic magnetic silicon (MEMS) technology.
Micralyne's facility renovation will substantially increase its manufacturing capacity to accommodate a growing customer base. The addition includes 10,000 sq ft of new manufacturing space with Class 10 and Class 1000 clean rooms for silicon MEMS fabrication, testing, and assembly.
It is well-known in semiconductor manufacturing that fast process feedback leads to better process control, which results in higher yield.