Megasonic
Megasonic news and technical articles from Solid State Technology Magazine. Search Megasonic latest and archived news and articles
-
Using multiple transducers at sub-65nm for single-wafer megasonics -based cleaning
… the reduced megasonics PRE, the conventional ..... increase the megasonic power level ..... in terms of megasonic energy distribution ..... Figure 1. Ideal megasonics energy distribution ..... order to use megasonics in wafer cleaning, the megasonic energy distribution …
-
Better, less expensive clean without megasonics
Engineers at NOVO Research (San Jose, CA) have developed a megasonic -free single-wafer ozone cleaning process — dubbed OzoneJet — that achieves high particle removal efficiency without damaging …
-
Megasonic cleaning charts a course to the big time
… ultrasonic and megasonic cleaning can ..... Ultrasonics and megasonics have also been ..... applications for which megasonic cleaning clearly ..... ultrasonics and megasonics on substrate ..... cleaned with megasonics . Megasonic cleaning is also …
-
Ultrasonics vs. Megasonics
… ultrasonic energizing. Megasonic cleaning uses much ..... to 2,000 KHz. Megasonics are particularly ..... chemistry also impact megasonic cleaning. Sonic ..... ultrasonics and megasonics , as well as the ..... ultrasonics and megasonics can be effective ..... applications overlap. Megasonic cleaning uses a …
-
UPDATE: Akrion, SSEC dispute single-wafer megasonic cleaning claims
… in certain of SSEC's single-wafer megasonic cleaning products. "The company has ..... particularly when it involves single-wafer megasonic -assisted cleaning," stated Akrion ..... SSEC says it turned down, believing its megasonic scrubbing devices to be substantially …
-
Megasonic cleaning tool seeks a clean sweep at ≤65nm
… its new Ultra C 300mm single-wafer megasonic cleaning tool, being debuted at this ..... explained to SST that the proprietary megasonic technology -- called space-alternated ..... to tightly and uniformly control the megasonic energy distribution across the wafer …
-
ACM Research Shanghai sells 1st 300mm megasonic clean tool
… Ultra C 12" (300mm) single-wafer megasonic cleaning tool at a leading Korea-based ..... post-etch and pre-metal processes. Megasonic power causes cavitation to help remove ..... prevents "hot spots" where aggressive megasonic energy causes bubbles to collapse. ACM …
-
Megasonic cleaning steps into the spotlight
… Hank Hogan SAN FRANCISCO--IN MEGASONIC cleaning, as the name implies ..... Campbell, CA), may make megasonic cleaning sparkle even brighter ..... Goldfinger Mach2 (above) uses megasonic technology to clean wafer surfaces …
-
Akrion sues over megasonic cleaning patents
… alleging infringement of patents related to megasonic cleaning technology. The company alleges that Prosys' sale of certain single-wafer megasonic cleaning products and megasonic batch processing systems infringe one or more …
-
Wafer Cleaning: Noncontact megasonics for post-Cu CMP cleaning
… chemicals is required. Megasonics offers an effective ..... scrubbers. Additionally, megasonics allows for a much wider ..... and single-wafer megasonic tools allow for both ..... batch tool). Using a megasonic clean step has three ..... more effectively with megasonics . A simplistic look …
