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  1. Thinned compound semiconductor wafer handling enabled by 3 Brewer Science tools

    Article

    Tue, 17 Apr 2012

    processing: a thermal debonder, separation tool, and megasonic cleaning system. Cee 1300CSX is a semi-automatic thermal ..... handles wafers from 2” to 12”. Cee 300MXD megasonic cleaning system applies uniform acoustic energy to spinning

  2. ACM Research Shanghai sells 1st 300mm megasonic clean tool

    Article

    Thu, 27 Oct 2011

    install its Ultra C 12" (300mm) single-wafer megasonic cleaning tool at a leading Korea-based memory manufacturer ..... Ultra ECP) chip fab tools, and single-wafer megasonic cleaning tools. Learn more at http://buyersguide.electroiq

  1. TSV fab tool combines stress-free CMP with thermal flow etch

    Article

    Thu, 27 Oct 2011

    stress-free copper polishing (Ultra SFP) and copper plating (Ultra ECP) chip fab tools, and single-wafer megasonic cleaning tools. Learn more at http://buyersguide.electroiq.com/Search/58107/.html Subscribe to Solid State

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