Mask
Mask news and technical articles from Solid State Technology Magazine. Search Mask latest and archived news and articles
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Model-based mask verification on 45nm logic gate masks
… et al., “Model-Based Mask Verification,” Proc. of SPIE ..... et al., “Model-Based Mask Verification on Critical 45nm Logic Masks ,” Proc. of SPIE Vol. 7028 ..... Grenoble) in Grenoble, and is the mask staff engineer at STMicroelectronics …
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AMAT's compact cleaning cluster for masks
… creation of phase-shift masks with sub-resolution ..... been essential for mask manufacturing, of ..... more concern with mask cleanliness today ..... soon start cleaning masks in-house during ..... capability such that masks are handled "dry ..... both sides of the mask simultaneously. The …
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Imec EUV mask cleaning program on track towards EUV mass manufacturing
… lithography (EUV) mask cleaning program for defect-free EUV masks that are crucial ..... materials of the EUV masks , but do not reduce mask lifetime through repetitive ..... Besides the lack of EUV mask inspection infrastructure ..... defect-free EUV masks , we experience day …
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Novellus replaces TiN hard masks with ceramic for sub-22nm nodes
… debuted ceramic hard mask (CHM) materials for use ..... titanium nitride (TiN) hard masks at 22nm and below: it ..... In contrast, TiN hard masks require the addition of ..... the etch of metal hard masks where non-volatile etch ..... since the ceramic hard mask materials do not require …
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Hynix joins SEMATECH's EUV mask group
… joined SEMATCH's EUV Mask Infrastructure (EMI ..... reviewing defects in advanced masks needed for extreme ultraviolet ..... together industry partners ( mask and chipmakers, mask blank suppliers, consortia ..... defects in advanced EUV masks . SEMATECH and Carl Zeiss …
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Double-patterning, topcoat-less photoresists and silicon hard masks
… capabilities, the ability of mask houses and designers to ..... toward one directional mask layouts, have all paved ..... such as spin-on hard masks , freezing/shrinking ..... spin-on silicon hard mask material is packaged with spin-on organic hard masks (underlayers) to make …
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Northeastern Surface Prep 2010: EUV masks , CMP, solar cell texturing, nano-chopsticks
… challenges of EUV lithography mask cleaning from an industrial perspective. Masks are fabricated using multilayered ..... systems immediately prior to mask use. Current processes ..... contaminants on Ru-capped EUV masks using dissolved gas DI ..... contamination from both the EUV mask substrate and the Ru capping …
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Chromeless phase-shift masks used for sub-100nm SOI CMOS transistors
… chromeless PSMs [2]. Two masks are used in this method ..... first is a darkfield mask with chromeless edges ..... features. Our device masks were fabricated at the Photronics advanced mask facility in Milpitas ..... undercut. The two masks used in the double ..... further simplifying the mask fabrication process …
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Model-based mask data prep using overlapping shots for 20nm devices
… shapes used to create the mask patterns so that the masks can be written using ..... MDP attractive for EUV masks as well. Recent tests by a leading mask writing equipment manufacturer ..... lithographic performance and mask cost of masks made by inverse lithography …
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An in-process strategy for defect-free CPL masks
… programmed defect CPL test mask on several leading-edge ..... guarantee defect-free CPL masks using current leading ..... Experimental conditions Test mask design and fabrication ..... inspection capability on CPL masks , but only for the main ..... inspection. A real CPL mask has a full tritone design …
