Lithography Materials
Lithography Materials news and technical articles from Solid State Technology Magazine. Search Lithography Materials latest and archived news and articles
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Lithography materials infrastructure benefits from a collaborative research approach
… continuing SEMATECH’s longstanding collaboration with all material suppliers for industry-wide benchmarking of lithography materials , the RMDC also provides an opportunity for resist and material suppliers to gain access to the highest-resolution …
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JSR joins lithography research at CEA-Leti
October 19, 2011 -- JSR Micro and CEA-Leti will partner to develop sub-20nm next-generation lithography materials and processes , focusing on pitch division in 193nm optical lithography for <20nm logic applications and on direct …
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ITF: Winning together with strategic collaboration
… that will continue to drive innovation at 20nm and beyond, even in the face of the very challenging barriers in lithography , materials , packaging, and wafer processing. Jan Provoost, science writer imec
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SEMATECH adds Inpria resists to EUV lithography work
… 22nm node and beyond This partnership will “rapidly increase the rate of development” for Inpria’s EUV lithography materials , said Andrew Grenville, CEO of Inpria. It will also “help strengthen the RMDC’s ability to address critical …
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High-productivity materials development for post-via etch residue removers
… is created in vias when multi-step anisotropic plasma-etch recipes interact with novel film stacks and the lithography materials used for patterning. The resulting residues are often a complex polymeric mixture of etch gas and film-stack …
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High-productivity materials development for post-via etch residue removers
… is created in vias when multi-step anisotropic plasma-etch recipes interact with novel film stacks and the lithography materials used for patterning. The resulting residues are often a complex polymeric mixture of etch gas and film-stack …
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Dow Corning taking collaborative route to photoresist goals
… working with "several leading lithography materials suppliers" targeting the ..... development partnerships with lithography materials suppliers. "It's not ..... s work with individual lithography materials suppliers (e.g., TOK …
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Brewer-Science-immersion-lithography-products
February 28, 2011 -- Brewer Science Inc., advanced lithography materials supplier, launched the OptiStack system of products: a combination of materials, software and process support for advanced lithography …
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SEMICON West: Shoes vs. phones, CMP users, updating Art's Law
… targeting; a larger process window is becoming a more important differentiator. Reduction of trace metals in lithography materials to 1-5 ppb. Greater sensitivity to 'blood minerals,' analogous to 'blood diamonds.' Ta, Ti, and anhydrous …
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Gate-first says Globalfoundries
… Vogler, senior technical editor, that Globalfoundries will harness three key enablers of technology scaling: lithography , materials (new materials and their integration), and 3D packaging. Kepler said that Globalfoundries will bring EUV …
