Lithographic
Lithographic news and technical articles from Solid State Technology Magazine. Search Lithographic latest and archived news and articles
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193-nm lithographic system lifetimes as limited by UV compaction
Second in Series 193-nm lithographic system lifetime as limited by ..... not only causes power loss in lithographic systems, but also induces temperature ..... the range of damage important to lithographic optics. In fact, compaction …
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Optimizing lithographic stack materials when using hyper-NA exposure tools
… with the same optical parameters can give very different lithographic results. In most cases, optimizing solely for minimum reflectivity ..... interaction with the underlayer, which strongly affects lithographic performance. The UV distribution can be controlled through …
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Si-Ware platform creates MOEMS on-wafer with lithographic alignment
Si-Ware Systems debuted the SiMOST platform to fab and package single-chip optical systems with validated MEMS components. Multiple MOEMS structures can be patterned and etched on SOI wafers using DRIE. The structures are then wafer-level packaged and diced.
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SPIE Advanced Lithography will bring industry focus to next-generation tools and systems
… meeting the challenges in developing state-of-the-art lithographic tools, resists, metrology , materials characterization, and ..... talks are organized into seven conferences: Alternative Lithographic Technologies Extreme Ultraviolet Lithography Metrology …
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Lithography materials infrastructure benefits from a collaborative research approach
… October 4, 2010) -- Advances in lithographic patterning critically depend on the ..... existing resists and materials to support lithographic patterning several nodes out from what ..... tool infrastructure that enables the lithographic evaluation of their capabilities …
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IBM Advances DNA "Origami" Structures
… have made an advancement in combining lithographic patterning with self assembly – a method ..... faced with the challenges of developing lithographic technology for feature sizes smaller ..... width of the DNA double helix. The lithographic templates were fabricated at IBM using …
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Fraunhofer partners for eco-friendly semiconductor clean chemistries
… for the microelectronics industry, specifically, removing lithographic materials from semiconductor wafers. During the two-year ..... examined if the new technology is suitable for the removal of lithographic laquers. Subsequently, the assessment will be expanded …
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HDDs: terabyte/in 2 a near-term reality
… disk drives— made possible by new lithographic processes with unprecedented levels ..... exposure tools and increasingly complex lithographic processes. Yet, the resolution and cost ..... densities of 200 GB/in² using minimum lithographic patterning for the MR transducer of 75nm …
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Integration extends 193nm litho
… Microlithography World, the 2007 SPIE lithography meeting detailed that 193nm wavelength lithographic reduction steppers may be the last mainstream lithographic technology for the semiconductor manufacturing industry. Process development engineers …
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Lithography data analysis
… analyzes, and visualizes experimental data and provides optimum lithographic process information in a matter of seconds. It analyzes ..... contrast curves, and focus-exposure data, and uses advanced lithographic analysis algorithms to provide results. Information can …
