Litho
Litho news and technical articles from Solid State Technology Magazine. Search Litho latest and archived news and articles
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Litho will get much tougher with double patterning, extensive computation
… complex computation as well as requirements for more litho -friendly design, explained ASML's Martin van den ..... process sequence for one approach, briefly called litho -freeze- litho -etch, that should be lowest in cost since the wafer …
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Litho forum poll: We want 193nm immersion ready for 45nm
… Attendees at the SEMATECH-sponsored Litho Forum in Vancouver, BC, May 22-24 discussed ..... double-exposure 193nm immersion and dry litho . For the 32nm node in 2012, extreme ..... 32nm half-pitch," added Bernie Roman, Litho Forum program chairman. Surveys of attendees …
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AMAT-inspection-Magma-yield-analysis-integration-accelerates-litho -quals-better-chip-yields
… inspection systems; it's called Excalibur Litho (see figure) and targets designs at 2xnm ..... that, without the ability to overcome litho qualification roadblocks rapidly, 22nm ..... volume production. Figure: Excalibur Litho enables litho defects to be cross-mapped …
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SEMATECH Litho Forum: Steady progress on all fronts
… lithography efforts reporting at SEMATECH’s Litho Forum (May 12-14, 2008, Bolton Landing ..... companies involved in e-beam maskless litho , all with tools in either the design or prototype ..... imprint lithography were also featured at the Litho Forum, and Lercel pointed to DNP’s improvement …
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SEMATECH Litho Forum: Steady progress on all fronts, surprise showing by e-beam
… lithography efforts reporting at SEMATECH's Litho Forum (May 12-14, 2008 at Bolton Landing ..... companies involved in e-beam maskless litho , all with tools in either the design or ..... imprint lithography were also featured at the Litho Forum, and Lercel pointed to DNP's improvement …
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IMEC updates 32nm litho progress
… of focus: high-index 193nm immersion litho , double-patterning, and EU. "We've made significant progress in the three litho approaches we are investigating within ..... IMEC says it will switch out its current litho tool, an ASML XT:1700i (1.2NA) tool …
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IMEC updates 32nm litho progress
… of focus: high-index 193nm immersion litho , double-patterning, and EU. "We've made significant progress in the three litho approaches we are investigating within ..... IMEC says it will switch out its current litho tool, an ASML XT:1700i (1.2NA) tool …
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Litho costs won't limit Moore's Law, but technology is the key
… at The ConFab. Comparing the future litho contenders in 2006, after reexamining ..... delaying the introduction of a new litho approach. In 2006, there are again ..... progress is the key to controlling future litho costs. -- B.H.
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Firm touts "breakthrough" for 32nm maskless litho
… beam writing" with its newest maskless litho technology, demonstrating 45nm dense patterns ..... in resist. The company's new maskless litho technology, which it says can significantly ..... Burn Lin, senior director of TSMC's litho division. Lin previously indicated that …
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Firm touts "breakthrough" for 32nm maskless litho
… beam writing" with its newest maskless litho technology, demonstrating 45nm dense patterns ..... in resist. The company's new maskless litho technology, which it says can significantly ..... Burn Lin, senior director of TSMC's litho division. Lin previously indicated that …
