Litho
Litho news and technical articles from Solid State Technology Magazine. Search Litho latest and archived news and articles
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Imec, ASML extend litho work, debut EUV sensors
… Imec is slated to install ASML's NXT 1950i 193nm immersion litho tool, and eventually will upgrade its current ASML NXE:3100 ..... leadership and commercial success." Among their collaborative litho work already bearing fruit are new sensors to help calibrate …
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Litho tool explores tradeoffs at 20nm and below
… and dose modulation; advanced e-beam modeling with arbitrary point spread functions for exploration; interactive aerial litho simulation from hardware acceleration; 5 × 5µm (on wafer) interactive mask-wafer double simulation; and SEM interface …
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Litho tool explores tradeoffs at 20nm and below
… and dose modulation; advanced e-beam modeling with arbitrary point spread functions for exploration; interactive aerial litho simulation from hardware acceleration; 5 x 5m (on wafer) interactive mask-wafer double simulation; and SEM interface for …
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Tighter chip densities tease out litho , metrology weaknesses, says Intel
… down to double density each generation. For 22nm and trigate, litho challenges are similar to what you'd have in other architectures ..... session at The ConFab to demonstrate the interconnectivity of litho , wafer processing, and metrology challenges, as well as the …
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Gigaphoton opens litho laser training center, regional HQ in OR
Lithography light source maker Gigaphoton Inc. opened its new U.S. Regional Headquarters and Training Center in Beaverton, OR.
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Litho readiness for next-gen logic, flash, and DRAM
Franklin Kalk, Toppan Photomasks, covers the major lithography demands of distinct semiconductor technologies: Logic, Flash, and DRAM. He also gives an update on fabless/foundry options, and Japan's earthquake recovery.
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Sokudo litho breakfast: Challenges for the 2Xnm node
CEA-Leti's Serge Tedesco and Didier Louis summarize key themes from the Sokudo lithography breakfast forum held last week at SEMICON West.
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Projection litho tool lowers CoO for HB-LED manufacturing
Doug Anberg, VP of advanced stepper technology at Ultratech, discusses the physics behind improvements in the company's new Sapphire 100E HB-LED tool in a video interview at SEMICON West 2011.
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Ushio 200mm litho tool suits 3D packaging steps
Ushio Inc. debuted a 200mm wafer full-field projection lithography tool UX4-3Di FFPL 200 for high-volume manufacturing of advanced LSI devices incorporating 3D integration technologies, such as TSVs and silicon interposers and bumps.
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New architectures, litho schemes take the stage at SEMICON West
Two TechXPOT sessions at SEMICON West will address the new architectures needed to continue scaling both logic and memory devices, as well as the major challenges facing lithography both for EUV and options for extending 193nm immersion.
