Layer Growth
Layer Growth news and technical articles from Solid State Technology Magazine. Search Layer Growth latest and archived news and articles
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Crucial applications addressed via fundamental ALD advances
… activation An important factor for the quality of ALD films is the preparation of the surfaces for initiating a continuous layer growth from the outset of ALD cycling. Higher hydroloxilation concentrations (e.g., Si-OH) are desired to obtain continuous …
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Process technology update: Progress on all fronts
… introduced alternately instead of simultaneously, as in standard CVD processes. This results in the layer-b y- layer growth that creates the characteristics of ALD films, making them appropriate for several applications. An example of the …
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The detrimental effect of moisture in SiGe epitaxy
… ppb to units of ppm. The wafers were first heated to ~1000°C to remove native oxide from the surface, prior to layer growth in a hydrogen atmosphere, at a reduced pressure (a few torr). The hydrogen used during the bake was the same as …
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In situ x-ray reflectivity for thin-film deposition monitoring and control
… of thickness measurements depends on the error in the angle of beam incidence, on the beam divergence, and on the layer growth rate. If the growth rate is not greater than 2-3?/min, then the error in the oscillation period is about a fraction …
