Layer Deposition
Layer Deposition news and technical articles from Solid State Technology Magazine. Search Layer Deposition latest and archived news and articles
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Silicon nanorod project yields higher efficiency solar cells
January 3, 2012 -- Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, reports successful final results of the European Union 7th Framework Programme funded research project ROD …
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ASM covers FinFET precursor needs from epitaxy to HKMG ALD
… discussed the challenges of making FinFET structures using both epitaxial and high- k /metal gate (HKMG) atomic layer deposition (ALD) processes, speaking with Solid State Technology during SEMICON West 2011 . "With epi, the challenges on …
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Thin film researchers install Cambridge NanoTech PEALD
… Cambridge NanoTech Fiji plasma-enhanced atomic layer deposition (PEALD) as part of a partnership with the ALD supplier ..... 4dlabs.ca . Cambridge NanoTech delivers Atomic Layer Deposition (ALD) systems capable of depositing ultra-thin …
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ALD tool applies self-assembled monolayers for MEMS/NEMS, says Cambridge NanoTech
… SAMs) capability in its line of Savannah atomic layer deposition (ALD) systems . SAMs coatings are inexpensive and ..... Cambridge, MA. Cambridge NanoTech makes atomic layer deposition (ALD) systems capable of depositing ultra-thin …
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ALD tool from Lesker suits MEMS, nano fab
… July 14, 2011 -- Kurt J. Lesker's new Atomic Layer Deposition system, the ALD 150LX, can operate as a stand ..... expandable LVP, HVP precursor delivery suits multiple ALD layer deposition , including metals, oxides and nitride layers …
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SEMATECH highlights from VLSI-TSA
… Ge and Si MOSFETs. High-field carrier mobility and MOSFET parameter characteristics were improved by atomic layer deposition (ALD) of a thin beryllium oxide layer to passivate the interface between the Si channel and high-k gate dielectric …
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Semiconductor wafer fab equipment trends: Deposition
… flat as a percentage of the overall deposition market. Gains were seen in the “other” portion, namely atomic layer deposition (ALD). ALD is used for the high- k gate dielectric in high- k /metal gate (HKMG) devices. Other as a whole …
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ALD enables 3D capacitors for CEA-Leti and IPDiA
April 10, 2012 -- Research organization CEA-Leti and passive component maker IPDiA developed an atomic layer deposition (ALD) process to apply medium- k dielectric layers on a metal-insulator-metal capacitor architecture, enabling …
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SAFC Hitech expands LED precursor production in Taiwan
… production serving high-brightness light-emitting diode (HB-LED) manufacturers. The site will also produce atomic layer deposition (ALD) and chemical vapor deposition (CVD) precursors for silicon semiconductor fabs and offer regional transfilling …
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Metallization processes for standardized wide-IO memory applications
… maskless backside isolation (MBI) layer deposition process is achieved, as shown ..... maskless backside isolation layer deposition with wet process. Conclusion ..... insulation/barrier/copper seed layer deposition based on wet electrografting …
