Ion Etch
Ion Etch news and technical articles from Solid State Technology Magazine. Search Ion Etch latest and archived news and articles
-
AMEC reactive ion etch tool enables sub-28nm nodes
… Fabrication Equipment Inc. (AMEC) launched its Primo second-generation 300mm very-high-frequency advanced decoupled reactive ion etch (AD-RIE) tool for sub-28nm critical process requirements. The wafer processing tool has an advanced RF system for process …
-
Plasma-Therm Reactive Ion Etch System, 200mm
Plasma-Therm Reactive Ion Etch System 790 Wafer Size Range: Minimum: 50 mm Maximum: 200 mm 11" Electrode Five gas Manufactured in 1998
-
Tegal+AMMS eyes growth in 3D packaging, MEMS
… Systems' (AMMS) deep reactive ion etch (DRIE) and plasma-enhanced chemical ..... Alcatel-Lucent's deep reactive ion etch (DRIE) and plasma-enhanced chemical ..... applications." Deep reactive- ion etching (DRIE) is a highly anisotropic …
-
Deep reactive ion etch
Deep reactive ion etch
-
Phantom III Reactive Ion Etch (RIE) System
The Phantom III RIE is designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries.
-
DRIE from MEMS to wafer-level packaging
EXECUTIVE OVERVIEW Deep reactive ion etching (DRIE) has enabled the manufacturing of many different types of MEMS devices. The technique is now starting to be applied to …
-
Turbodrag pumps
… bearing turbodrag pumps - the TMH 1600 MC, TMH 1000 MC, and TMH 400 MC - are designed for processes such as CVD, reactive ion etching , sputtering, ion implementation, and diffusion. The pumps feature noncontact magnetic bearings that eliminate the need …
-
Fluorine plasma chemistry for high-AR dielectric etching
… General trend in the evolution of reactive ion etch chemistries for anisotropic etching of ..... also known as microloading or reactive ion etching [RIE] lag) [9, 10]. Figure 2 ..... Observation of Inverse Reactive Ion Etching Lag for Silicon Dioxide Etching in Inductively …
-
Through-wafer Via Etching
… alternative. Silicon Deep Reactive Ion Etching Given the challenges facing wire bonding ..... manufacturing, anisotropic deep reactive ion etching of silicon is a mature process technology ..... micromachined with Si deep reactive ion etching processes, incorporating both narrow …
-
Optimizing plasma etch for MEMS devices
… materials include wet etch, chemical-plasma etch, reactive ion etch , and ion beam etching. Most of the plasma etch optimization ..... 87, Dec. 2000. I. Rangelow, H. Loeschner, "Reactive Ion Etching for Microelectrical Mechanical System Fabrication," J …
