Inspection Technologies
Inspection Technologies news and technical articles from Solid State Technology Magazine. Search Inspection Technologies latest and archived news and articles
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TEL adding Rudolph litho inspection to coater/developer
… deal to integrate Rudolph Technologies' lithography inspection technology in its coater/developer tools, with worldwide distribution ..... also addresses "possible next-generation integrated inspection technologies ."
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NIST funds advanced wafer inspection technology development
… Advanced Technology Program (ATP) has awarded $13.7 million in funding for a project to develop advanced wafer inspection technology for next-generation lithography (NGL) applications at the 50-nm and 70-nm nodes. A team of researchers …
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Holistic substrate inspection for defects at the 32nm node and beyond
… of several different inspection technologies in a single tool ( Table ..... Combining multiple inspection technologies enables more accurate ..... undetected using one inspection technology can be found by other ..... combination of different inspection technologies makes sense only if …
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Holistic substrate inspection for defects at the 32nm node and beyond
… of several different inspection technologies in a single tool ( Table ..... Combining multiple inspection technologies enables more accurate ..... undetected using one inspection technology can be found by other ..... combination of different inspection technologies makes sense only if …
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Optimizing feedback time using high-throughput darkfield imaging
… oxide CMP tool. Multiple inspection technology strategy To tailor an inspection ..... employ several different inspection technologies . This mix of inspectors ..... required [6]. This multiple inspection technology strategy preserves the balance …
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Defect inspection technologies to meet the challenges of advanced CMP process
Defect inspection technologies to meet the challenges of advanced CMP processes James Reynolds, Reynolds Consulting, Sunnyvale, California Aaron L. Swecker …
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X-ray Inspection Technology : Finding Hidden Defects
Not all packaging and interconnect defects can be detected through in-circuit and functional test.
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KLA-Tencor Wafer Inspection Technology Speeds Ramp of 300 mm Production
November 28, 2001 -- SAN JOSE, CA -- KLA-Tencor Corp. recently announced that Texas Instruments (TI) has placed a follow-on order for KLA-Tencor's 2350 ultraviolet (UV) inspection system. This order is a result of the critical role the 2350 system is playing in the rapid ramp of TI's first 300 mm
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GE-intros-CT-system-for-3D-metrology-and-analysis
… November 29, 2010) -- The phoenix nanotom m, from GE´s Inspection Technologies business , has been developed for high resolution and ..... said Oliver Brunke, product manager for CT at GE’s Inspection Technologies business. nanoCT of through-silicon-vias (50µm …
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Advanced packaging collab Rudolph Technologies process tool supplier IC device manufacturer for defect inspection wafer debonding
… wafers, necessitates the integration of inspection in de-bonding applications. Rudolph is bringing its inspection technologies to this three-way collaboration to provide this integrated process control solution. The first two revenue …
