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Rudolph Technologies product manager Tuan Le tells SST about the improvements in its systems for detecting edge defects, necessitated by the switch to immersion lithography at 45nm.
The Explorer Cluster allows individual systems to be configured with any combination of wafer front, back, and edge inspection modules allowing the user to mix and match inspection requirements.
To meet the needs of LED manufacturers, the AltaSight LEDMax has a flexible design, accomodating up to three inspection modules for volume manufacturing inspection, process development or R&D work. It inspects compound semiconductor wafers
collaboration to provide this integrated process control solution. The first two revenue-generating Rudolph F30 inspection modules will ship in Q1, 2011. " Rudolph Technologies is pleased to participate in such a forward-looking program with
influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells
launched the F30 Advanced Macro Inspection Module in its Explorer Inspection Cluster product line. Multiple F30 Inspection Modules have been purchased in recent weeks, and several are already installed in high-volume semiconductor manufacturing
of the cells. The system can easily be retrofitted into existing lines and can be configured to include multiple inspection modules (each with a solution-optimized design). Xiris Automation Inc., Intersolar North America 2010, Moscone Center
influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells
system equipped with integrated backside and edge inspection modules (Rudolph Technologies AXi, E20, and B20). The ..... review stage. Integration of the backside and edge inspection modules with the frontside inspection tool permits a streamlined
influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells