Inspection Modules
Inspection Modules news and technical articles from Solid State Technology Magazine. Search Inspection Modules latest and archived news and articles
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Inside Rudolph's new inspection modules
Rudolph Technologies product manager Tuan Le tells SST about the improvements in its systems for detecting edge defects, necessitated by the switch to immersion lithography at 45nm.
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Explorer Inspection Cluster
The Explorer Cluster allows individual systems to be configured with any combination of wafer front, back, and edge inspection modules allowing the user to mix and match inspection requirements.
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LED inspection unit launches Altatech Semiconductor's LEDs line
… To meet the needs of LED manufacturers, the AltaSight LEDMax has a flexible design, accomodating up to three inspection modules for volume manufacturing inspection, process development or R&D work. It inspects compound semiconductor wafers …
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Advanced packaging collab Rudolph Technologies process tool supplier IC device manufacturer for defect inspection wafer debonding
… collaboration to provide this integrated process control solution. The first two revenue-generating Rudolph F30 inspection modules will ship in Q1, 2011. " Rudolph Technologies is pleased to participate in such a forward-looking program with …
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Industry News
… influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells …
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Rudolph's new F30 advanced macro inspection module wins foundry, MEMS orders
… launched the F30 Advanced Macro Inspection Module in its Explorer Inspection Cluster product line. Multiple F30 Inspection Modules have been purchased in recent weeks, and several are already installed in high-volume semiconductor manufacturing …
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Exhibitor highlights for Intersolar North America 2010
… of the cells. The system can easily be retrofitted into existing lines and can be configured to include multiple inspection modules (each with a solution-optimized design). Xiris Automation Inc., Intersolar North America 2010, Moscone Center …
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Industry News
… influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells …
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Improving wafer yields with integrated all-surface inspection
… system equipped with integrated backside and edge inspection modules (Rudolph Technologies AXi, E20, and B20). The ..... review stage. Integration of the backside and edge inspection modules with the frontside inspection tool permits a streamlined …
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New inspection tool addresses yield, solar cell classification
… influences revenue. Vandewalle noted that revenue from a given solar cell production line can be improved using the new inspection modules by eliminating “overkill” errors in cell classification at the end of the line. “Errors in classification of cells …
