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Imprint Lithography

Imprint Lithography news and technical articles from Solid State Technology Magazine. Search Imprint Lithography latest and archived news and articles

  1. A template infrastructure for step-and-flash imprint lithography

    Magazine Articles

    Wed, 1 Feb 2006

    for 1× step-and-flash imprint lithography can be fabricated using extensions ..... silicon market. How will imprint lithography avoid sharing the fate of the others? Imprint lithography has now been included on the

  2. OAI adds nano imprint lithography option for mask aligners

    Online Articles

    Wed, 1 Aug 2007

    August 1, 2007 -- OAI (Optical Associates Inc.) says that it has added to its mask aligners nano imprint lithography with sub-20 nm resolution. Working with Nanolithosolution Inc. (NLS), OAI is offering a nano imprint module

  1. HDD patterned media using jet-and-flash imprint lithography

    Online Articles

    Fri, 4 Sep 2009

    physically patterned using imprint lithography . The first incarnation of ..... roadmap. Jet-and-flash imprint lithography (J-FIL), which uses targeted ..... Templates for Step and Flash Imprint Lithography ," Jour. of Microlithography

  2. Step-and-flash imprint lithography for patterning interconnect dielectrics

    Magazine Articles

    Sat, 1 Sep 2007

    trenches can be patterned in one imprint lithography step. Also removed from the ..... multilevel step and flash imprint lithography (S-FIL) process flow ..... polymerization is always a concern for imprint lithography ; however, the vitrification

  3. Manufacturing patterned media with step and flash imprint lithography

    Magazine Articles

    Mon, 1 Sep 2008

    bits/in 2 . Step and flash imprint lithography (S-FIL), a low-pressure ..... exposure fields. Details of the imprint lithography process For semiconductor ..... volume manufacturing. An imprint lithography tool has been developed to meet

  4. High-volume full-wafer step-and-flash imprint lithography

    Magazine Articles

    Thu, 1 Feb 2007

    media industry. Ultraviolet imprint lithography , and specifically S-FIL ..... features using step-and-flash imprint lithography for a) 32nm lines, b) 32nm ..... 1100 step-and-flash imprint lithography full wafer production tool

  5. Semiconductor and HDD manufacturers turning to imprint lithography

    Online Articles

    Wed, 7 Jan 2009

    shrinking, low cost/bit: imprint lithography . As EUV continues to delay ..... industry can afford. In contrast, imprint lithography , with its lower cost and ability ..... HDD manufacturers to turn to imprint lithography .

  6. Development and advantages of step-and-flash lithography

    Magazine Articles

    Sun, 1 Jul 2001

    lithography, step-and-flash imprint lithography , appears to be an inexpensive ..... alternative, we have been studying imprint lithography (IL) as an inexpensive method ..... compromising throughput. Imprint lithography There are many IL techniques

  7. Extending/complementing optical litho using S-FIL for memory applications

    Online Articles

    Fri, 4 Jul 2008

    insurmountable. Step and flash imprint lithography Recently a new technology, called Step and Flash Imprint Lithography (S-FIL), has gained attention ..... Schematic of step and flash imprint lithography process. Recently published

  8. MII continues bid to make J-FIL the choice over EUV for NVM

    Online Articles

    Sun, 5 Jul 2009

    bid to make jet and flash imprint lithography (J-FIL) the next-generation ..... will be the first users of imprint lithography . "What happens after that ..... replicated with jet and flash imprint lithography (J-FIL). (Source: Molecular